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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | | style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | System down. Troubleshooting in progress. | ||
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Revision as of 15:48, 30 October 2025
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please read the training page and afterwards contact cleanroom@nbi.ku.dk.] A cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV EBL/SEM | Tool down. Stage controller is being received next week [reassembling the tool on week 45] |
| Elionix 7000 100 kV EBL | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45] |
| Elionix F-125 125kV EBL | Annual service & gun fillament exchange. [down time: Weeks 45 and 46] |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! |
| ALD1 | Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues. |
| ALD2 | All good! [Scheduled servicing of the scroll pump: Week 47] |
| FS bonder | All good! Please return the hex Wera screwdrivers. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire! |
| K&S bonder | All good! |
| Loomis scriber | Dual PC is not working, the tool is okay to use with a single operating PC |
| Dicing saw | All good! |
| AFM | System down. Troubleshooting in progress. |
List updated: Thursday 30 Oct 2025
Tool access requirement guidelines
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| eLine | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| LED writer | No | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| Plassys | Yes | Yes | Yes | Yes |
| E-gun | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica sputter | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | No | Yes | Yes | Yes |
| Profilometer | Yes | Yes | Yes | Yes |
| Ellipsometer | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Filmetrics | Yes | Yes | Yes | Yes |
| Manual scriber | Yes | Yes | Yes | Yes |
| Dicing saw | No | No | No | No |
| Loomis scriber | No | No | No | No |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Plasma-Preen asher | Yes | Yes | Yes | Yes |
| Tergeo asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |