Bruker Dimension Icon AFM
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| Essentials | |
|---|---|
| Full name | Dimension Icon PT |
| Manufacturer | Bruker |
| Description | Atomic Force Microscope |
| Location | Characterization room (03.01.K08) |
| Responsibility | |
| Primary | Martin |
| Secondary | Karolis |
Bruker Dimension Icon is an atomif force microscope used for accurate surface topography measurements. Users can measure tilm thickness, roughness and get other topographical data characteristics with Ångstrom accuracy.
Other alternatives for surface characterization at the NBI cleanroom facilities:
- Tencor profilometer for step height and profile roughness
- Alpha-SE ellipsometer for transparent film overall thickness and roughness
- Filmetrics reflectometer for transparent film overall thickness and roughness
- JEOL 7800F SEM for film thickness by observing material cross-sections, elemental analysis
Quick start - ScanAsyst mode
- Open the enclosure hood. Red key goes counter-clockwise to unlock.
- From the desktop, open the the Nanoscope software. This also powers up the tool (red lamp lit on scan head) .
- Load the ScanAsyst in Air experiment.
- In the left panel, select Setup.
- - In panel 1.1 make sure that the ScanAsyst-Air probe is selected.
- - Make sure that the cantilever is visible in the microscope. If you are not sure, zoom all the way out with the controls below the microscope window.
- - Perform laser and photodetector alignment following steps 1.2-1.5.
- In the left panel, select Navigate
- - Load sample on the unblocked vacuum hole and toogle on the chuck vacuum by the switch (picture)
- - Drive the stage to place the sample under the scan head by using the XY navigation panel in the software or the track ball.