Filmetrics reflectometer
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Filmetrics reflectometer
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| Essentials |
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| Full name | Filmetrics F2-RT aRTie |
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| Manufacturer | Filmetrics |
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| Description | Reflectometer |
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| Location | Cleanroom 2 (03.2.203B) |
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| Responsibility |
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| Primary | Zhe |
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Filmetrics F2 introduction and usage guidelines
- The Filmetrics F2 is used to measure the reflectance and transmittance of thin films and with the proper software upgrades film thickness and refractive index can also be measured. Any films to be measured must be optically smooth and flat. Some commonly measured films include semiconductor process films such as oxides, nitrides, resists, and polysilicon, optical coatings such as hardcoats and anti-reflection coatings, and flat panel display films such as polyimides, resist, and cell gaps. Films that cannot be measured include very rough films and opaque metal films.
- This tool belongs to Quantum Photonics group, and is available for all cleanroom users. Please write to the cleanroom staff (cleanroom@nbi.ku.dk) to ask for training and access.
