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Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.

Tools	Safety	Fabrication	Booking	Training	About	MBE	Sustainability

NEWS: NBI-Cleanroom Training Request Form

Starting in July 2026, a standardized training request form will be introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities.

Current tool status

Heidelberg LED writer	All good!
Raith eLine 30 kV	All good!
Elionix 7000 100 kV	Service: Blanking aperture. Expected recovery date: Until further notice.
Elionix F-125 125 kV	All good!
AJA1	Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
AJA2	All good!
Plassys Evaporator	All good!
E-Gun evaporator	All good! The chamber is dedicated to In
ALD1	All good!
ALD2	All good!
FS bonder	All good!
K&S bonder	All good!
Loomis scriber	All good!
Dicing saw	All good!
AFM	All good!
JEOL JSM-7800F	All good!
JEOL JSM-7800F prime	All good!
TEM	All good!

List updated: Tue 1 July 2026