Tools
Before submitting a training request, please review the prerequisites for each instrument in the Training section.
A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days.
Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
Tool access requirement guidelines
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| eLine | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| LED writer | No | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| Plassys | Yes | Yes | Yes | Yes |
| E-gun | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica sputter | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | No | No | Yes | Yes |
| Profilometer | Yes | Yes | Yes | Yes |
| Ellipsometer | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Filmetrics | Yes | Yes | Yes | Yes |
| Manual scriber | Yes | Yes | Yes | Yes |
| Dicing saw | No | No | No | No |
| Loomis scriber | No | No | No | No |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Plasma-Preen asher | Yes | Yes | Yes | Yes |
| Tergeo asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |