Tools

From cleanroom
Jump to: navigation, search

A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.

Once the user has completed the training, s/he is given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other

Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
Heidelberg No Yes Yes Yes
Mask aligner Yes Yes Yes Yes
AJAs Yes Yes Yes Yes
e-gun Yes Yes Yes Yes
Edwards Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica Yes Yes Yes Yes
JEOL 6230F Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No Yes Yes Yes
Alphastep Yes Yes Yes Yes
Sensofar Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Süss scriber Yes Yes Yes Yes
Loomis scriber No No* Yes Yes
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Plasma-preen asher Yes Yes Yes Yes
Diener asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes