Leica sputter coater
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| Essentials | |
|---|---|
| Full name | Leica EM SDC005 |
| Manufacturer | Leica Microsystems |
| Description | Table-top sputter coater |
| Location | 2nd floor lab (03.2.213) |
| Manual | Printed copy next to instrument |
| Responsibility | |
| Primary | Nader |
Other material deposition alternatives at the NBI cleanroom:
- ALD systems
- AJA systems for sputtering/e-gun evaporation
- E-Gun evaporator
- Edwards thermal evaporator
- Molecular beam epitaxy system