E-Gun evaporator

Other material deposition alternatives at the NBI cleanroom:

• ALD systems
• AJA systems for sputtering/e-gun evaporation
• Edwards thermal evaporator
• Leica sputter coater
• Molecular beam epitaxy system

Guide to 4-pocket e-gun box chamber

Loading sample/pumping down loadlock:

1. Make sure that the following valves have the mentioned state:
   1. Gate valve (GV) between the chamber and Load lock (LL) is closed.
   2. Sample valve (SV) between the Load lock (LL) and roughing pump is closed.
   3. Roughing valve (RV) between roughing pump and diffusion pump is open.

   Pay attention that SV often is in open position! If so, close it.

2. Vent the load lock by opening the air vent valve.
3. Close the air vent valve.
4. Release the clamp and pull the load lock up, holding the grey handle, not the sliding rod.
5. Mount the load lock in the vice and DO NOT tighten it more than necessary to hold the load lock.
6. Mount the sample(s) on the sample holder.
   1. Secure the load lock in its position on the chamber by fastening the clamp.
   2. Secure the sample holder with the aluminum clamp keeping it in the top position.
7. Close RV.
8. Open SV and follow the pressure on the LL gauge until it drops below 10-1 mbar.
9. When PLL ≤ 10-1 mbar, open the RV.
10. When PLL ≤ 10-2 mbar, close the SV.
11. Check for pressure rise in LL due to leak!
12. Open GV slowly and secure it in open position.
13. Remove the aluminum clamp and let the sample holder slide gently into the chamber.
14. When the pressure of the chamber is ≤ 5.10-7 mbar, evaporation can be initiated.

Deposition

1. Chamber pressure must be < 1x10-6 torr before starting.
2. Choose material on index wheel on the right side of the chamber.
3. Key the density and TF for the chosen metal.
4. Turn on power supply (PS) outside clean room.
   • Push all four breakers up from left to right.
5. On remote control in clean room turn key to “Man”.
6. Wind the egg-timer up.
7. Turn on HV and set to about 6 kV.
8. Turn on emission and adjust slowly to desired value (Typically: 0,05-0,15 A).
9. Open viewport shutter and center beam in crucible using XY ctrl’s.
   • Close it as soon as material heats up to prevent coating of viewport.
10. Turn sample shutter to position “Xtal open” to expose rate monitor.
11. Adjust emission to give the desired rate in Å/sec.
12. Open sample shutter fully to begin deposition on sample.
13. When desired thickness is reached, set sample shutter to position: “Closed.
14. Turn down emission and turn off.
15. Turn down HV and turn off.
16. Wait until material cools before turning the index wheel to the next material.
    • For another deposition jump to point 5.
17. Set key to “Safe” 16. Turn off power supply.
    • Pull up all four breakers from right to left.

Unload sample/Venting Loadlock

1. The load Lock (LL) is under High vacuum(HV) and the valves are in the following state:
   1. GV is opened.
   2. SV is closed.
   3. RV is open.
2. Pull up the sample holder and secure it with the aluminum clamp in top position.
3. Close GV.
4. Repeat step 2 to 9 from page 1. It leaves LL in vacuum.

Originally wrote by:180708/CBS

Updated by: Nader Payami

Wednesday, December 07, 2016