Süss mask aligner
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Essentials | |
---|---|
Full name | Karl Süss MJB3 |
Manufacturer | Karl Süss |
Description | Mask aligner |
Location | Cleanroom 1 (03.2.209A) |
Responsibility | |
Primary | Nader |
Other lithography tools at the NBI cleanroom:
- Elionix 7000 EBL
- Elionix F-125 EBL
- Raith eLine EBL
- Heidelberg µPG 501 LED writer