Raith eLine
 | |
| Essentials | |
|---|---|
| Full name | Raith eLine |
| Manufacturer | Raith Nanofabrication |
| Description | Electron beam lithography and microscopy system |
| Location | Cleanroom (03.2.209C) |
| Responsibility | |
| Primary | Shiv |
| Secondary | Karolis |
Raith eLine is a variable acceleration voltage (up to 30 kV) scanning electron microscope/lithography tool. Nowadays most e-beam lithography needs are covered by Elionix 7000 and Elionix F-125, so this machine is primarily used for imaging. It is very convenient to set up automated image acquisition using imaging scripts inside of a position list with coordinates. You can also import your device design (GDS) and use it as a map. There is an automatic height sensing (AHS) upgrade installed.
Other lithography tools at the NBI cleanroom:
- Elionix 7000, 100 kV EBL
- Elionix F-125, 125 kV EBL at QuanTech
- Heidelberg µPG 501 LED writer
- Süss mask aligner
Other SEM imaging tools:
- JEOL 7800F
- JEOL 7800F prime at QuanTech
eLine usage and reservation guidelines
- To book time on the machine go to the web schedule. You should make a booking in the system, even if the machine is available and not booked by others.
- Late cancellations of sessions that you’ve signed up should only happen when unforeseen conflicts or unexpected fab difficulties occur. Please do not sign up to use equipment unless you are prepared and have every intention of using the time.
If you don't have an account write to the cleanroom staff (cleanroom@nbi.dk) and we will provide you with username and password.
- Use the dedicated SEM (JEOL) for microscopy, unless the e_Line is really needed. Ask for SEM training if needed.
- Between the hours of 9 am and 6 pm on weekdays, you should:
- not reserve more than 3 hours. See (*)
- not book a 2nd slot, before the 1st one is done. See (*)
- delete booking only before the starting time.
- write to the experiment mailing list that the machine is free, if you finish earlier.
(*) Some NW wafer exposures take longer and exceptions to these rules are made to accommodate these tasks. A special account NW-MBE is used in the booking system to indicate these jobs.
- Please talk to a staff member if you have fab jobs that are not compatible with the rules above
Troubleshooting
- Error regarding failed 5V supply during EM server software startup?
- Normal and harmless.
Maintenance
Beam stability test
- Gun monitor software: start, change interval to 5-15 s
- SEM software: EHT ON
- WD 10 mm
- View > SEM status, save screenshot of this window
- ELINE software: move to Faraday cup
- 5w
- Start script beamstability.js (user Administrator folder Scripts)
Closing the CCV
Needed when preparing for CDA or power shutdown.
SEM software > open right hand menu > Airlock > Close CCV
Remote access
- TeamViewer: ELINE
- LogMeIn: ELINE