Diener plasma asher
 | |
| Essentials | |
|---|---|
| Full name | Femto |
| Manufacturer | Diener electronic GmbH + Co. KG |
| Description | Plasma cleaning/etching system |
| Location | Cleanroom 1 (03.2.209A) |
| Responsibility | |
| Primary | Nader |
| Secondary | Martin |
The Diener plasma asher is used for two main purposes, surface activation and decontamination.
Some cleanroom users use the asher before spinning resist because oxygen plasma increases the substrate surface energy, which increases surface wettability.
The asher is also used after developing resist in order to ash away any small residues left in the developed substrate areas. This process is also known as descumming.
At higher process power and/or longer plasma time the asher can ash away all organic materials, such as photo- or e-beam resist.
In cleanroom 2 there is a Tergeo plasma asher.
There is a Plasma-Preen asher outside of the cleanroom in the 2nd floor lab.
Usage rules
This tool is for semiconductors only. This means no daughterboards, beakers, tweezers, etc.
Make sure your samples are absolutely 100% dry before putting them in the asher.
Quick-start guide
Video on how to operate our Diener Plasma Asher:
Click here to watch video on YouTube
Load your sample
- Open the door.
- Slide out the quartz plate.
- Place your sample in the center.
- Slide the plate back in.
- Close door.
- Turn on pump using the green button labeled PUMP.
Execute an ashing program
- On the touch screen, using the stylus, press the small up/down arrows to select the desired program (plasma time).
- Press the green button labeled START.
- Wait for the program to finish.
- When it is time for the plasma to strike, you can look through the mesh in the door and check for a purple glow inside the chamber.
- When the program is done the status squares will turn white on the screen.
Unload your sample
- Turn off the pump.
- Open the door.
- Slide out the plate.
- Remove your sample.
- Close the door.
- Fill in the log book beside the tool.
- Done!