Resists

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This is a list of resists stocked at the NBI cleanroom.

There is a separate page for experimentally determined doses.

Stocked resists

Photoresists

Electron beam resists

Current stock in Cleanroom
PMMA series Negative resist CSAR EL series
AR-P 672.02 (PMMA 950K)//A2 AR-N 7520.18 AR-P 6200.04 ( CSAR ) MMA( 8.5 )MAA EL6
AR-P 672.03 (3%PMMA 950K)//A3 AR-P 6200.09 ( CSAR ) MMA( 8.5 )MAA EL9
AR-P 672.045 * PMMA A4.5//A4 AR-P 6200.13 ( CSAR ) MMA( 8.5 )MAA EL13
AR-P 672.06//A6
AR-P 672.08 PMMA 950K//A8
AR-P 642.09 PMMA 200K

What's in a name?

Some product names are straightforward, like PMMA 950K A4.

PMMA: polymethylmethacrylate

950K: molecular weight

A4: solvent and solids wt%, in this case anisole 4%


NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).


Some product names are vendor specific, like AR-P 672.045.

AR: vendor AllResist

P: positive resist

672: product series, in this case PMMA 950K in anisole

045: 4.5% solids in wt%

Purchasing

micro resist

MicroChem was bought by Kayaku. micro resist is the European distributor.

Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.

Always ask for expiration date of the batch you're ordering, might be as short as 3 months.

Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).

Sales sales@microresist.de

PMMA A-series: PMMA 950K AX

Copolymer EL-series: MMA MAA ELX

Negative resist: ma-N 2403

AllResist

Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.

Only source for CSAR.

Sales order@allresist.de

PMMA 950K in anisole: AR-P 672.XXX

CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)

Negative resist: AR-N 7520.XX

Zeon

ZEP 520A

Ancillaries

AllResist

PMMA developer: AR 600-56

Adhesion promoter: AR 300-80 (info on internal QDev wiki)

micro resist

ma-N developer: ma-D 525

SigmaAldrich/Merck

Wheaton wide-mouth bottle: capacity 30 mL, amber, white polypropylene cap, PTFE flat liner [1]