Resists
This is a list of resists stocked at the NBI cleanroom.
There is a separate page for experimentally determined doses.
Stocked resists
Photoresists
- AZ 1505 (technical data sheet)
- AZ 4500 series (data sheet)
- AZ 5214 E (data sheet)
- AZ nLOF 2000 (data sheet)
- MR ma-N 400 & 1400 (data sheet)
- AR-N 7520 NEW (high sensitivity) (data sheet)
- AR-N 7520 ORIG. (low sensitivity)
- SU-8 (data sheet)
Electron beam resists
| PMMA series | Common name | Thickness (nm at 4000 rpm for 60 sec) |
|---|---|---|
| AR-P 672.02 (PMMA 950K) | A2 | 70 |
| AR-P 672.03 (3%PMMA 950K) | A3 | 120 |
| AR-P 672.045 * PMMA A4.5 | A4 | 250 |
| AR-P 672.06 | A6 | 450 |
| AR-P 672.08 PMMA 950K | A8 | 800 |
| AR-P 642.09 PMMA 200K | A9 | |
| EL series | Common name | Thickness (nm at 4000 rpm for 60 sec) |
| MMA( 8.5 )MAA EL6 | EL6 | |
| MMA( 8.5 )MAA EL9 | EL9 | |
| MMA( 8.5 )MAA EL13 | EL13 | |
| AR-N resists | Common name | Thickness (nm at 4000 rpm for 60 sec) |
| AR-N 7520.07 | ||
| AR-N 7520.11 | ||
| AR-N 7520.18 | ||
| CSAR series | Common name | Thickness (nm at 4000 rpm for 60 sec) |
| AR-P 6200.04 | CSAR 4 | 80 |
| AR-P 6200.09 | CSAR 9 | 200 |
| AR-P 6200.13 | CSAR 13 | 400 |
| Adhesion Promoter | Common name | Thickness (nm at 4000 rpm for 60 sec) |
| AR 300-80 NEW Adhesion promoter | ||
| AR-PC | Common name | Thickness (nm at 4000 rpm for 60 sec) |
| AR-PC 5090.02 | 40 |
- PMMA A-series (data sheet)
- AR-P 6200 (CSAR) (data sheet)
- ZEP 520A
- MMA copolymer EL-series (data sheet, page on the internal QDev wiki)
What's in a name?
Some product names are straightforward, like PMMA 950K A4.
PMMA: polymethylmethacrylate
950K: molecular weight
A4: solvent and solids wt%, in this case anisole 4%
NBI cleanroom uses this convention. E.g. A4, EL6 (PMMA 950K ethyl lactate 6%), CSAR9 (CSAR 9%).
Some product names are vendor specific, like AR-P 672.045.
AR: vendor AllResist
P: positive resist
672: product series, in this case PMMA 950K in anisole
045: 4.5% solids in wt%
Purchasing
micro resist
MicroChem was bought by Kayaku. micro resist is the European distributor.
Slow lead time (3-6 weeks), short shelf life (11 months), large minimum (500 ml), expensive.
Always ask for expiration date of the batch you're ordering, might be as short as 3 months.
Only source for copolymer EL-series (MMA (8.5) MAA in ethyl lactate).
Sales sales@microresist.de
PMMA A-series: PMMA 950K AX
Copolymer EL-series: MMA MAA ELX
Negative resist: ma-N 2403
AllResist
Has PMMA substitutes, short lead time, cheaper, small minimum (30 ml), longer shelf life.
Only source for CSAR.
Sales order@allresist.de
PMMA 950K in anisole: AR-P 672.XXX
CSAR in anisole: AR-P 6200.XX (lowest is 4%, but can successfully dilute with anisole)
Negative resist: AR-N 7520.XX
Zeon
ZEP 520A
Ancillaries
AllResist
PMMA developer: AR 600-56
Adhesion promoter: AR 300-80 (info on internal QDev wiki)
micro resist
ma-N developer: ma-D 525
SigmaAldrich/Merck
Wheaton wide-mouth bottle: capacity 30 mL, amber, white polypropylene cap, PTFE flat liner [1]