Sensofar optical profiler
 | |
| Essentials | |
|---|---|
| Full name | Sensofar S neox |
| Manufacturer | Sensofar Metrology |
| Description | Optical profiler |
| Location | Cleanroom 2 |
| Responsibility | |
| Primary | Nader |
| Secondary | Nikki |
Sensofar S Neox is a versatile, non-contact 3D optical profiler used for high-precision surface metrology. It combines confocal, interferometry and focus variation techniques to characterize a wide range of surface topology and materials, including roughness, flatness, step height and texture. Choosing the appropriate technique based on the sample's surface characteristics is essential for obtaining accurate and reliable results.
Confocal: for high lateral resolution to very rough surfaces. Interferometry (PSI/VSI/ePSI): for smooth to moderately rough surfaces and sub-nanometer height resolution. Focus Variation: for very rough or steep surfaces.
Compared with contact profilometry and AFM:
- Lower lateral resolution than AFM for nanoscale feature.
- Less suitable for measuring features smaller than the optical diffraction limit.
- Transparent and semi-transparent films may generate reflections from multiple interfaces, which can reduce measurement accuracy.
💡Questions?
For more information, kindly contact NBI-Cleanroom staff.