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= Tools =
Before submitting a training request, please review the prerequisites for each instrument in the [[Training]] section.
 
'''A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form ([https://forms.office.com/e/b3PDKjsZ88?origin=lpr NBI-Cleanroom Training Request Form]). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days'''.
 
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
 
== Tool list ==
{| style="width: 85%;"
{| style="width: 85%;"
|- style="text-align:left;"
|- style="text-align:left;"
! Lithography !! Thin film & III-V processing !! Characterization !! Other
! Lithography !! Thin film & III-Vs !! Characterization !! Other
|- valign="top"  
|- valign="top"  
| style="width: 20%;" |
| style="width: 20%;" |
* [[Raith eLine]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* [[Elionix]]
<!-- * [[Süss mask aligner]] -->
* [[Heidelberg µPG 501|Heidelberg laser writer]]
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]
* Süss mask aligner
* [[Elionix_7000|Elionix 7000 100 kV EBL]]
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)
| style="width: 20%;" |
| style="width: 20%;" |
* [[AJA Systems]]
* [[AJA systems]]
* E-Gun evaporator
* [[Plassys Evaporator]]
* Edwards thermal evaporator
* [[E-Gun evaporator]]
* Spinners
<!-- * [[Edwards evaporator|Edwards thermal evaporator]] -->
* ALD 1
* [[Laurell spinners]]
* ALD 2
* [[Cambridge ALD]]
* [[Leica sputter coater]]
* [[Leica sputter coater]]
* MBE
* [[MBE]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[JEOL 6320F|JEOL JSM 6320F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[JEOL 7800F|JEOL JSM 7800F]]
* [[Raith eLine]]
* [[Raith eLine]]
* TEM
* [[Talos F200i S/TEM]]
* Alphastep profilometer
* [[Tencor profilometer]]
* Sensofar optical profiler
* [[Alpha-SE ellipsometer]]
* Olympus microscopes
* [[Sensofar optical profiler]]
* AFM
* [[Olympus microscopes]]
* [[Lynx EVO stereomicroscope]]
* [[Bruker Dimension Icon AFM]]
* [[Filmetrics reflectometer]]
* [[Probe station]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[Süss scriber]]
* [[Süss scriber|Manual Süss scriber]]
* Loomis scriber
* [[Loomis scriber|Automatic Loomis scriber]]
* [[Dicing saw]]
* [[AccuThermo RTA]]
* [[AccuThermo RTA]]
* Biorad oven
* [[Biorad]]
* µ-wave plasma oven
* [[Plasma-Preen asher]]
* Denier RF-asher
* [[Diener plasma asher]]
* K&S Ball Bonder
* [[Tergeo plasma asher]]
* Präzitherm hotplates
* [[FS bonder]]
* [[K&S bonder]]
* [[Micromanipulator]]
* [[Präzitherm hotplates]]
* [[Critical point dryer]]
|}
|}


= Tool availability =
 
== Tool access requirement guidelines ==
 
{| cellspacing=0px style="text-align: center;"
{| cellspacing=0px style="text-align: center;"
! scope="col" width="20%" align="right"  |  
! scope="col" width="20%" align="right"  |  
Line 46: Line 63:
! scope="col" width="20%" | Postdoc
! scope="col" width="20%" | Postdoc
|-
|-
| style="text-align:right" | AJAs
| style="text-align:right; padding-right:6px;" | [[Raith eLine|eLine]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Elionix]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | e-gun
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[AJA Systems|AJAs]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 58: Line 89:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Thermal
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator|Plassys]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 64: Line 95:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Edwards
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 70: Line 101:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
|
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Leica sputter coater|Leica sputter]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right" | Eline
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 78: Line 121:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Elionix
| style="text-align:right; padding-right:6px;" | [[Talos F200i S/TEM |TEM]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Tencor profilometer|Profilometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | JEOL 6230F
| style="text-align:right; padding-right:6px;" | [[Alpha-SE Ellipsometer|Ellipsometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 90: Line 139:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | JEOL 7800F
<!-- | style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|- -->
|
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
|-
| style="text-align:right" | Heidelberg
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 104: Line 151:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Mask aligner
| style="text-align:right; padding-right:6px;" | [[Filmetrics reflectometer|Filmetrics]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 110: Line 157:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
|
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right" | Manual scriber
| style="text-align:right; padding-right:6px;" | [[Süss scriber|Manual scriber]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 118: Line 165:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Loomis scriber
| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
| style="text-align:right; padding-right:6px;" | [[AccuThermo RTA|RTA]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
|
| style="text-align:right; padding-right:6px;" | [[Biorad]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | MBE
| style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Tergeo Plasma Asher|Tergeo asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Laurell spinners|Spinners]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|}
|}
[[Category:Tools]]

Latest revision as of 11:30, 16 July 2026

Before submitting a training request, please review the prerequisites for each instrument in the Training section.

A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other


Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
LED writer No Yes Yes Yes
AJAs Yes Yes Yes Yes
Plassys Yes Yes Yes Yes
E-gun Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica sputter Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No No Yes Yes
Profilometer Yes Yes Yes Yes
Ellipsometer Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Filmetrics Yes Yes Yes Yes
Manual scriber Yes Yes Yes Yes
Dicing saw No No No No
Loomis scriber No No No No
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Plasma-Preen asher Yes Yes Yes Yes
Tergeo asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes
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