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| Line 14: | Line 14: | ||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[Heidelberg µPG 501|Heidelberg LED writer]] | * [[Heidelberg µPG 501|Heidelberg LED writer]] | ||
* [[Süss mask aligner]] | <!-- * [[Süss mask aligner]] --> | ||
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]] | * [[Raith eLine|Raith eLine 30 kV EBL/SEM]] | ||
* [[Elionix_7000|Elionix 7000 100 kV EBL]] | * [[Elionix_7000|Elionix 7000 100 kV EBL]] | ||
| Line 22: | Line 22: | ||
* [[Plassys Evaporator]] | * [[Plassys Evaporator]] | ||
* [[E-Gun evaporator]] | * [[E-Gun evaporator]] | ||
* [[Edwards evaporator|Edwards thermal evaporator]] | <!-- * [[Edwards evaporator|Edwards thermal evaporator]] --> | ||
* [[Laurell spinners]] | * [[Laurell spinners]] | ||
* [[Cambridge ALD]] | * [[Cambridge ALD]] | ||
| Line 30: | Line 30: | ||
* [[JEOL 7800F|JEOL JSM-7800F]] | * [[JEOL 7800F|JEOL JSM-7800F]] | ||
* [[Raith eLine]] | * [[Raith eLine]] | ||
* [[Philips TEM]] | <!-- * [[Philips TEM]] --> | ||
* [[Tencor profilometer]] | * [[Tencor profilometer]] | ||
* [[Alpha-SE ellipsometer]] | * [[Alpha-SE ellipsometer]] | ||
* [[Sensofar optical profiler]] | |||
* [[Olympus microscopes]] | * [[Olympus microscopes]] | ||
* [[Lynx EVO stereomicroscope]] | * [[Lynx EVO stereomicroscope]] | ||
| Line 49: | Line 49: | ||
* [[Tergeo plasma asher]] | * [[Tergeo plasma asher]] | ||
* [[FS bonder]] | * [[FS bonder]] | ||
* [[K&S bonder]] | |||
* [[Micromanipulator]] | * [[Micromanipulator]] | ||
* [[Präzitherm hotplates]] | * [[Präzitherm hotplates]] | ||
| Line 78: | Line 78: | ||
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]] | | style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]] | ||
| style="background-color: #ff9f9f" | No | | style="background-color: #ff9f9f" | No | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| Line 96: | Line 90: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[ | | style="text-align:right; padding-right:6px;" | [[Plassys Evaporator|Plassys]] | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| Line 102: | Line 96: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[ | | style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]] | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| Line 121: | Line 115: | ||
|- | |- | ||
| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F]] | ||
| Line 177: | Line 165: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |||
| style="text-align:right; padding-right:6px;" | [[Dicing saw]] | |||
| style="background-color: #ff9f9f" | No | |||
| style="background-color: #ff9f9f" | No | |||
| style="background-color: #ff9f9f" | No | |||
| style="background-color: #ff9f9f" | No | |||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]] | | style="text-align:right; padding-right:6px;" | [[Loomis scriber]] | ||
| Line 196: | Line 190: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Plasma-Preen | | style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher]] | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
Latest revision as of 09:05, 9 September 2025
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please read the training page and afterwards contact cleanroom@nbi.ku.dk.] A cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
Tool access requirement guidelines
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| eLine | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| LED writer | No | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| Plassys | Yes | Yes | Yes | Yes |
| E-gun | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica sputter | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | No | Yes | Yes | Yes |
| Profilometer | Yes | Yes | Yes | Yes |
| Ellipsometer | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Filmetrics | Yes | Yes | Yes | Yes |
| Manual scriber | Yes | Yes | Yes | Yes |
| Dicing saw | No | No | No | No |
| Loomis scriber | No | No | No | No |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Plasma-Preen asher | Yes | Yes | Yes | Yes |
| Tergeo asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |