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A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.
Before submitting a training request, please review the prerequisites for each instrument in the [[Training]] section.
This includes basic instruments such as hotplates and microscopes.
For '''all''' training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]
A cleanroom staff member will typically respond within one workday.
Do not contact individual staff members for training.  


Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
'''A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form ([https://forms.office.com/e/b3PDKjsZ88?origin=lpr NBI-Cleanroom Training Request Form]). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days'''.
 
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.


== Tool list ==
== Tool list ==
Line 30: Line 28:
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[Raith eLine]]
* [[Raith eLine]]
<!-- * [[Philips TEM]] -->
* [[Talos F200i S/TEM]]
* [[Tencor profilometer]]
* [[Tencor profilometer]]
* [[Alpha-SE ellipsometer]]
* [[Alpha-SE ellipsometer]]
Line 54: Line 52:
* [[Critical point dryer]]
* [[Critical point dryer]]
|}
|}
==Current tool status==


{| cellspacing=0px style="text-align: left;"
|-
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV EBL/SEM]]
| style="background-color: #ff9f9f" | Tool down. Stage controller is being received next week [reassembling the tool on week 45]
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV EBL]]
| style="background-color: #FFD700" | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125kV EBL]]
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. [down time: Weeks 45 and 46]
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="background-color: #FFD700" | Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="background-color: #c6e0b4" | All good! [Scheduled servicing of the scroll pump: Week 47]
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
|-
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #FFD700" | Dual PC is not working, the tool is okay to use with a single operating PC
|-
| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #c6e0b4" | System down. Troubleshooting in progress.
|}
''List updated: Thursday 30 Oct 2025''


== Tool access requirement guidelines ==
== Tool access requirement guidelines ==
Line 182: Line 121:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | [[Philips TEM|TEM]]
| style="text-align:right; padding-right:6px;" | [[Talos F200i S/TEM |TEM]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes

Latest revision as of 11:30, 16 July 2026

Before submitting a training request, please review the prerequisites for each instrument in the Training section.

A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other


Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
LED writer No Yes Yes Yes
AJAs Yes Yes Yes Yes
Plassys Yes Yes Yes Yes
E-gun Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica sputter Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No No Yes Yes
Profilometer Yes Yes Yes Yes
Ellipsometer Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Filmetrics Yes Yes Yes Yes
Manual scriber Yes Yes Yes Yes
Dicing saw No No No No
Loomis scriber No No No No
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Plasma-Preen asher Yes Yes Yes Yes
Tergeo asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes