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A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For '''all''' training requests, please contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk], and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.  
Before submitting a training request, please review the prerequisites for each instrument in the [[Training]] section.


Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
'''A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form ([https://forms.office.com/e/b3PDKjsZ88?origin=lpr NBI-Cleanroom Training Request Form]). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days'''.
 
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.


== Tool list ==
== Tool list ==
Line 9: Line 11:
|- valign="top"  
|- valign="top"  
| style="width: 20%;" |
| style="width: 20%;" |
* [[Raith eLine]]
* [[Elionix|Elionix EBL system]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* [[Süss mask aligner]]
<!-- * [[Süss mask aligner]] -->
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]
* [[Elionix_7000|Elionix 7000 100 kV EBL]]
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)
| style="width: 20%;" |
| style="width: 20%;" |
* [[AJA Systems]]
* [[AJA systems]]
* [[Plassys Evaporator]]
* [[E-Gun evaporator]]
* [[E-Gun evaporator]]
* [[Edwards evaporator|Edwards thermal evaporator]]
<!-- * [[Edwards evaporator|Edwards thermal evaporator]] -->
* [[Laurell spinners]]
* [[Laurell spinners]]
* [[Cambridge ALD]]
* [[Cambridge ALD]]
Line 22: Line 26:
* [[MBE]]
* [[MBE]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[JEOL 6320F|JEOL JSM-6320F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[Raith eLine]]
* [[Raith eLine]]
* [[Philips TEM]]
* [[Talos F200i S/TEM]]
* [[Tencor profilometer]]
* [[Tencor profilometer]]
* [[Alpha_SE Ellipsometer]]
* [[Alpha-SE ellipsometer]]
* [[Sensofar optical profiler]]
* [[Sensofar optical profiler]]
* [[Olympus BX51M|Olympus BX51M microscopes]]
* [[Olympus microscopes]]
* [[Lynx EVO stereomicroscope]]
* [[Bruker Dimension Icon AFM]]
* [[Bruker Dimension Icon AFM]]
* [[Filmetrics reflectometer]]
* [[Probe station]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[Süss scriber]]
* [[Süss scriber|Manual Süss scriber]]
* [[Loomis scriber]]
* [[Loomis scriber|Automatic Loomis scriber]]
* [[Dicing saw]]
* [[Dicing saw]]
* [[AccuThermo RTA]]
* [[AccuThermo RTA]]
* [[Biorad]]
* [[Plasma-Preen asher]]
* [[Plasma-Preen asher]]
* [[Diener plasma asher]]
* [[Diener plasma asher]]
* [[Tergeo plasma asher]]
* [[FS bonder]]
* [[FS bonder]]
<!-- * [[K&S Ball Bonder]] -->
* [[K&S bonder]]
* [[Micromanipulator]]
* [[Präzitherm hotplates]]
* [[Präzitherm hotplates]]
* [[Critical point dryer]]
|}
|}


== Tool access requirement guidelines ==
== Tool access requirement guidelines ==
Line 52: Line 63:
! scope="col" width="20%" | Postdoc
! scope="col" width="20%" | Postdoc
|-
|-
| style="text-align:right; padding-right:6px;" |  eLine
| style="text-align:right; padding-right:6px;" |  [[Raith eLine|eLine]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Elionix
| style="text-align:right; padding-right:6px;" | [[Elionix]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Heidelberg
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | Mask aligner
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | AJAs
| style="text-align:right; padding-right:6px;" | [[AJA Systems|AJAs]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | e-gun
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator|Plassys]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Edwards
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | ALD
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Leica Sputter
| style="text-align:right; padding-right:6px;" | [[Leica sputter coater|Leica sputter]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 110: Line 115:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 6230F
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 7800F
| style="text-align:right; padding-right:6px;" | [[Talos F200i S/TEM |TEM]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Tencor profilometer|Profilometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | TEM
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Alphastep Tencor profilometer
| style="text-align:right; padding-right:6px;" | [[Alpha-SE Ellipsometer|Ellipsometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 134: Line 139:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Alpha_SE Ellipsometer
<!-- | style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|- -->
| style="text-align:right; padding-right:6px;" | Sensofar
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 146: Line 151:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | AFM
| style="text-align:right; padding-right:6px;" | [[Filmetrics reflectometer|Filmetrics]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 154: Line 159:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | Süss scriber
| style="text-align:right; padding-right:6px;" | [[Süss scriber|Manual scriber]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 160: Line 165:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Loomis scriber
| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
Line 166: Line 171:
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
|-
| style="text-align:right; padding-right:6px;" | RTA
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
| style="text-align:right; padding-right:6px;" | [[AccuThermo RTA|RTA]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Biorad
| style="text-align:right; padding-right:6px;" | [[Biorad]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
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| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Plasma-preen asher
| style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 184: Line 195:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Diener asher
| style="text-align:right; padding-right:6px;" | [[Tergeo Plasma Asher|Tergeo asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 190: Line 201:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Spinners
| style="text-align:right; padding-right:6px;" | [[Laurell spinners|Spinners]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 196: Line 207:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|}
|}
[[Category:Tools]]

Latest revision as of 11:30, 16 July 2026

Before submitting a training request, please review the prerequisites for each instrument in the Training section.

A standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Please only request training for instruments that require immediate access. Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities. The Cleanroom staff will acknowledge and respond to training requests within 1-2 working days.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity (90-day) on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other


Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
LED writer No Yes Yes Yes
AJAs Yes Yes Yes Yes
Plassys Yes Yes Yes Yes
E-gun Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica sputter Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No No Yes Yes
Profilometer Yes Yes Yes Yes
Ellipsometer Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Filmetrics Yes Yes Yes Yes
Manual scriber Yes Yes Yes Yes
Dicing saw No No No No
Loomis scriber No No No No
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Plasma-Preen asher Yes Yes Yes Yes
Tergeo asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes
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