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= Tools =
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.
This includes basic instruments such as hotplates and microscopes.
For '''all''' training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]
A cleanroom staff member will typically respond within one workday.
Do not contact individual staff members for training.
 
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
 
== Tool list ==
{| style="width: 85%;"
{| style="width: 85%;"
|- style="text-align:left;"
|- style="text-align:left;"
! Lithography !! Thin film & III-V processing !! Characterization !! Other
! Lithography !! Thin film & III-Vs !! Characterization !! Other
|- valign="top"  
|- valign="top"  
| style="width: 20%;" |
| style="width: 20%;" |
* [[Raith eLine]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* [[Elionix]]
* [[Süss mask aligner]]
* [[Heidelberg µPG 501|Heidelberg laser writer]]
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]
* Süss mask aligner
* [[Elionix_7000|Elionix 7000 100 kV EBL]]
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)
| style="width: 20%;" |
| style="width: 20%;" |
* [[AJA Systems]]
* [[AJA systems]]
* E-Gun evaporator
* [[Plassys Evaporator]]
* Edwards thermal evaporator
* [[E-Gun evaporator]]
* Spinners
* [[Edwards evaporator|Edwards thermal evaporator]]
* ALD 1
* [[Laurell spinners]]
* ALD 2
* [[Cambridge ALD]]
* [[Leica sputter coater]]
* [[Leica sputter coater]]
* MBE
* [[MBE]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[JEOL 6320F|JEOL JSM 6320F]]
* [[JEOL 6320F|JEOL JSM-6320F]]
* [[JEOL 7800F|JEOL JSM 7800F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[Raith eLine]]
* [[Raith eLine]]
* TEM
* [[Philips TEM]]
* Alphastep profilometer
* [[Tencor profilometer]]
* Sensofar optical profiler
* [[Alpha-SE ellipsometer]]
* Olympus microscopes
<!-- * [[Sensofar optical profiler]] -->
* AFM
* [[Olympus microscopes]]
* [[Lynx EVO stereomicroscope]]
* [[Bruker Dimension Icon AFM]]
* [[Filmetrics reflectometer]]
* [[Probe station]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[Süss scriber]]
* [[Süss scriber|Manual Süss scriber]]
* Loomis scriber
* [[Loomis scriber|Automatic Loomis scriber]]
* [[Dicing saw]]
* [[AccuThermo RTA]]
* [[AccuThermo RTA]]
* Biorad oven
* [[Biorad]]
* µ-wave plasma oven
* [[Plasma-Preen asher]]
* Denier RF-asher
* [[Diener plasma asher]]
* K&S Ball Bonder
* [[Tergeo plasma asher]]
* Präzitherm hotplates
* [[FS bonder]]
<!-- * [[K&S Ball Bonder]] -->
* [[Micromanipulator]]
* [[Präzitherm hotplates]]
* [[Critical point dryer]]
|}
|}


= Tool availability =
== Tool access requirement guidelines ==
{| class="wikitable" style="text-align: center;"
 
! Tool !! Bachelor !! Master !! PhD !! Postdoc
{| cellspacing=0px style="text-align: center;"
! scope="col" width="20%" align="right"  |
! scope="col" width="20%" | Bachelor
! scope="col" width="20%" | Master
! scope="col" width="20%" | PhD
! scope="col" width="20%" | Postdoc
|-
|-
| style="text-align:right" | AJAs
| style="text-align:right; padding-right:6px;" | [[Raith eLine|eLine]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Elionix]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | e-gun
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Süss mask aligner|Mask aligner]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 54: Line 89:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Thermal
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[AJA Systems|AJAs]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 60: Line 97:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Edwards
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- style="height:40px border:none"
|
|-
|-
| style="text-align:right" | Eline
| style="text-align:right; padding-right:6px;" | [[Edwards evaporator|Edwards]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Leica sputter coater|Leica sputter]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 6320F]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 74: Line 135:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Elionix
| style="text-align:right; padding-right:6px;" | [[Philips TEM|TEM]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 80: Line 141:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | JEOL 6230F
| style="text-align:right; padding-right:6px;" | [[Tencor profilometer|Profilometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 86: Line 147:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | JEOL 7800F
| style="text-align:right; padding-right:6px;" | [[Alpha-SE Ellipsometer|Ellipsometer]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- style="height:40px border:none"
|
|-
|-
| style="text-align:right" | Heidelberg
<!-- | style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- -->
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 100: Line 165:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Mask aligner
| style="text-align:right; padding-right:6px;" | [[Filmetrics reflectometer|Filmetrics]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- style="height:40px border:none"
|
|-
|-
| style="text-align:right" | Manual scriber
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[Süss scriber|Manual scriber]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 114: Line 179:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right" | Loomis scriber
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
| style="text-align:right; padding-right:6px;" | [[AccuThermo RTA|RTA]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Biorad]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher|Microwave asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Diener plasma asher|Diener asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Tergeo Plasma Asher|Tergeo asher]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- style="height:40px border:none"
|
|-
|-
| style="text-align:right" | MBE
| style="text-align:right; padding-right:6px;" | [[Laurell spinners|Spinners]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|}
|}
[[Category:Tools]]

Latest revision as of 08:59, 16 November 2023

A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please read the training page and afterwards contact cleanroom@nbi.ku.dk.] A cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other

Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
LED writer No Yes Yes Yes
Mask aligner Yes Yes Yes Yes
AJAs Yes Yes Yes Yes
E-gun Yes Yes Yes Yes
Edwards Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica sputter Yes Yes Yes Yes
JEOL 6320F Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No Yes Yes Yes
Profilometer Yes Yes Yes Yes
Ellipsometer Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Filmetrics Yes Yes Yes Yes
Manual scriber Yes Yes Yes Yes
Loomis scriber No No No No
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Microwave asher Yes Yes Yes Yes
Diener asher Yes Yes Yes Yes
Tergeo asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes
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