Tools: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
|||
| (17 intermediate revisions by 3 users not shown) | |||
| Line 1: | Line 1: | ||
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For '''all''' training requests, please contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk] | A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. | ||
This includes basic instruments such as hotplates and microscopes. | |||
For '''all''' training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].] | |||
A cleanroom staff member will typically respond within one workday. | |||
Do not contact individual staff members for training. | |||
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool. | Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool. | ||
| Line 9: | Line 13: | ||
|- valign="top" | |- valign="top" | ||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[Heidelberg µPG 501|Heidelberg LED writer]] | * [[Heidelberg µPG 501|Heidelberg LED writer]] | ||
* [[Süss mask aligner]] | * [[Süss mask aligner]] | ||
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]] | |||
* [[Elionix_7000|Elionix 7000 100 kV EBL]] | |||
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech) | |||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[AJA | * [[AJA systems]] | ||
* [[Plassys Evaporator]] | |||
* [[E-Gun evaporator]] | * [[E-Gun evaporator]] | ||
* [[Edwards evaporator|Edwards thermal evaporator]] | * [[Edwards evaporator|Edwards thermal evaporator]] | ||
| Line 27: | Line 33: | ||
* [[Philips TEM]] | * [[Philips TEM]] | ||
* [[Tencor profilometer]] | * [[Tencor profilometer]] | ||
* [[Alpha-SE | * [[Alpha-SE ellipsometer]] | ||
* [[Sensofar optical profiler]] | <!-- * [[Sensofar optical profiler]] --> | ||
* [[Olympus | * [[Olympus microscopes]] | ||
* [[Lynx EVO stereomicroscope]] | |||
* [[Bruker Dimension Icon AFM]] | * [[Bruker Dimension Icon AFM]] | ||
* [[Filmetrics reflectometer]] | * [[Filmetrics reflectometer]] | ||
* [[Probe station]] | |||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[Süss scriber]] | * [[Süss scriber|Manual Süss scriber]] | ||
* [[Loomis scriber]] | * [[Loomis scriber|Automatic Loomis scriber]] | ||
* [[Dicing saw]] | * [[Dicing saw]] | ||
* [[AccuThermo RTA]] | * [[AccuThermo RTA]] | ||
* [[Biorad]] | |||
* [[Plasma-Preen asher]] | * [[Plasma-Preen asher]] | ||
* [[Diener plasma asher]] | * [[Diener plasma asher]] | ||
* [[Tergeo | * [[Tergeo plasma asher]] | ||
* [[FS bonder]] | * [[FS bonder]] | ||
<!-- * [[K&S Ball Bonder]] --> | <!-- * [[K&S Ball Bonder]] --> | ||
* [[Micromanipulator]] | |||
* [[Präzitherm hotplates]] | * [[Präzitherm hotplates]] | ||
* [[Critical point dryer]] | |||
|} | |} | ||
| Line 142: | Line 153: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]] | <!-- | style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]] | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|- | |- --> | ||
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | | style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| Line 193: | Line 204: | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Diener plasma asher|Diener asher]] | | style="text-align:right; padding-right:6px;" | [[Diener plasma asher|Diener asher]] | ||
| style="background-color: #c6e0b4" | Yes | |||
| style="background-color: #c6e0b4" | Yes | |||
| style="background-color: #c6e0b4" | Yes | |||
| style="background-color: #c6e0b4" | Yes | |||
|- | |||
| style="text-align:right; padding-right:6px;" | [[Tergeo Plasma Asher|Tergeo asher]] | |||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
| Line 204: | Line 221: | ||
| style="background-color: #c6e0b4" | Yes | | style="background-color: #c6e0b4" | Yes | ||
|} | |} | ||
[[Category:Tools]] | |||
Latest revision as of 08:59, 16 November 2023
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please read the training page and afterwards contact cleanroom@nbi.ku.dk.] A cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
Tool access requirement guidelines
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| eLine | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| LED writer | No | Yes | Yes | Yes |
| Mask aligner | Yes | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| E-gun | Yes | Yes | Yes | Yes |
| Edwards | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica sputter | Yes | Yes | Yes | Yes |
| JEOL 6320F | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | No | Yes | Yes | Yes |
| Profilometer | Yes | Yes | Yes | Yes |
| Ellipsometer | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Filmetrics | Yes | Yes | Yes | Yes |
| Manual scriber | Yes | Yes | Yes | Yes |
| Loomis scriber | No | No | No | No |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Microwave asher | Yes | Yes | Yes | Yes |
| Diener asher | Yes | Yes | Yes | Yes |
| Tergeo asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |