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A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. Once the user has completed the training, s/he is given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training.
This includes basic instruments such as hotplates and microscopes.
For '''all''' training requests, please read the [[Training|training]] page and afterwards contact [mailto:cleanroom@nbi.ku.dk cleanroom@nbi.ku.dk].]
A cleanroom staff member will typically respond within one workday.
Do not contact individual staff members for training.  


Some tools are reserved for more experienced users, or those who have reached certain academic qualifications, as shown in the table below.  
Once the user has completed the training, they are given booking rights in the [http://cleanroom.brickhost.com cleanroom booking system]. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.


For '''all''' training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
== Tool list ==
 
= Tool list =
{| style="width: 85%;"
{| style="width: 85%;"
|- style="text-align:left;"
|- style="text-align:left;"
Line 11: Line 13:
|- valign="top"  
|- valign="top"  
| style="width: 20%;" |
| style="width: 20%;" |
* [[Raith eLine]]
* [[Elionix|Elionix EBL system]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* [[Heidelberg µPG 501|Heidelberg LED writer]]
* Süss mask aligner
* [[Süss mask aligner]]
* [[Raith eLine|Raith eLine 30 kV EBL/SEM]]
* [[Elionix_7000|Elionix 7000 100 kV EBL]]
* [[Elionix_F-125|Elionix F-125 125kV EBL]] (QuanTech)
| style="width: 20%;" |
| style="width: 20%;" |
* [[AJA Systems]]
* [[AJA systems]]
* [[Plassys Evaporator]]
* [[E-Gun evaporator]]
* [[E-Gun evaporator]]
* [[Edwards thermal evaporator]]
* [[Edwards evaporator|Edwards thermal evaporator]]
* [[Laurell spinners]]
* [[Laurell spinners]]
* [[Cambridge ALD]]
* [[Cambridge ALD]]
* [[Leica sputter coater]]
* [[Leica sputter coater]]
* MBE
* [[MBE]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[JEOL 6320F|JEOL JSM 6320F]]
* [[JEOL 6320F|JEOL JSM-6320F]]
* [[JEOL 7800F|JEOL JSM 7800F]]
* [[JEOL 7800F|JEOL JSM-7800F]]
* [[Raith eLine]]
* [[Raith eLine]]
* [[Philips TEM]]
* [[Philips TEM]]
* [[Alphastep profilometer]]
* [[Tencor profilometer]]
* [[Sensofar optical profiler]]
* [[Alpha-SE ellipsometer]]
<!-- * [[Sensofar optical profiler]] -->
* [[Olympus microscopes]]
* [[Olympus microscopes]]
* [[AFM]]
* [[Lynx EVO stereomicroscope]]
* [[Bruker Dimension Icon AFM]]
* [[Filmetrics reflectometer]]
* [[Probe station]]
| style="width: 20%;" |
| style="width: 20%;" |
* [[Süss scriber]]
* [[Süss scriber|Manual Süss scriber]]
* [[Loomis scriber]]
* [[Loomis scriber|Automatic Loomis scriber]]
* [[Dicing saw]]
* [[AccuThermo RTA]]
* [[AccuThermo RTA]]
* [[Biorad oven]]
* [[Biorad]]
* [[µ-wave plasma oven]]
* [[Plasma-Preen asher]]
* [[Denier RF-asher]]
* [[Diener plasma asher]]
* [[K&S Ball Bonder]]
* [[Tergeo plasma asher]]
* [[FS bonder]]
<!-- * [[K&S Ball Bonder]] -->
* [[Micromanipulator]]
* [[Präzitherm hotplates]]
* [[Präzitherm hotplates]]
* [[Critical point dryer]]
|}
|}


= Tool access requirements =
== Tool access requirement guidelines ==


{| cellspacing=0px style="text-align: center;"
{| cellspacing=0px style="text-align: center;"
Line 52: Line 65:
! scope="col" width="20%" | Postdoc
! scope="col" width="20%" | Postdoc
|-
|-
| style="text-align:right; padding-right:6px;" | Raith Eline
| style="text-align:right; padding-right:6px;" | [[Raith eLine|eLine]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 58: Line 71:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Elionix
| style="text-align:right; padding-right:6px;" | [[Elionix]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 64: Line 77:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Heidelberg
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 70: Line 83:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Mask aligner
| style="text-align:right; padding-right:6px;" | [[Süss mask aligner|Mask aligner]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 78: Line 91:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | AJAs
| style="text-align:right; padding-right:6px;" | [[AJA Systems|AJAs]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 84: Line 97:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | e-gun
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 90: Line 103:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Edwards
| style="text-align:right; padding-right:6px;" | [[Edwards evaporator|Edwards]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 96: Line 109:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Spinners
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 102: Line 115:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | ALD
| style="text-align:right; padding-right:6px;" | [[Leica sputter coater|Leica sputter]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 108: Line 121:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Leica
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 6320F]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 114: Line 129:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | MBE
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | [[Philips TEM|TEM]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="padding-bottom:6px;" |
| style="text-align:right; padding-right:6px;" | [[Tencor profilometer|Profilometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 6230F
| style="text-align:right; padding-right:6px;" | [[Alpha-SE Ellipsometer|Ellipsometer]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 128: Line 153:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | JEOL 7800F
<!-- | style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]]
| style="background-color: #ff9f9f" | No
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|- -->
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | TEM
| style="text-align:right; padding-right:6px;" | [[Filmetrics reflectometer|Filmetrics]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | Alphastep
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Sensofar
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | Microscopes
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
| style="text-align:right; padding-right:6px;" | AFM
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|-
|-
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | Süss scriber
| style="text-align:right; padding-right:6px;" | [[Süss scriber|Manual scriber]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
Line 172: Line 179:
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Loomis scriber
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
| style="background-color: #ff9f9f" | No
|-
| style="text-align:right; padding-right:6px;" | [[AccuThermo RTA|RTA]]
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | RTA
| style="text-align:right; padding-right:6px;" | [[Biorad]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Biorad
| style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher|Microwave asher]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | µ-wave
| style="text-align:right; padding-right:6px;" | [[Diener plasma asher|Diener asher]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Denier asher
| style="text-align:right; padding-right:6px;" | [[Tergeo Plasma Asher|Tergeo asher]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
|-
| style="text-align:right; padding-right:6px;" | Ball-bonder
| style="text-align:right; padding-right:6px;" | [[Laurell spinners|Spinners]]
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
| style="background-color: #cccccc" | ?
| style="background-color: #c6e0b4" | Yes
|-
| style="text-align:right; padding-right:6px;" | Hotplates
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
| style="background-color: #cccccc" | ?
|}
|}
[[Category:Tools]]

Latest revision as of 08:59, 16 November 2023

A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please read the training page and afterwards contact cleanroom@nbi.ku.dk.] A cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography Thin film & III-Vs Characterization Other

Tool access requirement guidelines

Bachelor Master PhD Postdoc
eLine No Yes Yes Yes
Elionix No Yes Yes Yes
LED writer No Yes Yes Yes
Mask aligner Yes Yes Yes Yes
AJAs Yes Yes Yes Yes
E-gun Yes Yes Yes Yes
Edwards Yes Yes Yes Yes
ALD Yes Yes Yes Yes
Leica sputter Yes Yes Yes Yes
JEOL 6320F Yes Yes Yes Yes
JEOL 7800F No Yes Yes Yes
TEM No Yes Yes Yes
Profilometer Yes Yes Yes Yes
Ellipsometer Yes Yes Yes Yes
AFM Yes Yes Yes Yes
Filmetrics Yes Yes Yes Yes
Manual scriber Yes Yes Yes Yes
Loomis scriber No No No No
RTA Yes Yes Yes Yes
Biorad Yes Yes Yes Yes
Microwave asher Yes Yes Yes Yes
Diener asher Yes Yes Yes Yes
Tergeo asher Yes Yes Yes Yes
Spinners Yes Yes Yes Yes
Retrieved from "https://wiki.nbi.ku.dk/w/cleanroom/index.php?title=Tools&oldid=2273"