Tools

A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please contact cleanroom@nbi.ku.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography	Thin film & III-Vs	Characterization	Other
Raith eLine Elionix EBL system Heidelberg LED writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards thermal evaporator Laurell spinners Cambridge ALD Leica sputter coater MBE	JEOL JSM-6320F JEOL JSM-7800F Raith eLine Philips TEM Tencor profilometer Alpha_SE Ellipsometer Sensofar optical profiler Olympus BX51M microscopes Bruker Dimension Icon AFM	Süss scriber Loomis scriber Dicing Saw AccuThermo RTA Plasma-Preen asher Diener plasma asher FS bonder Präzitherm hotplates

Tool access requirement guidelines

	Bachelor	Master	PhD	Postdoc
eLine	No	Yes	Yes	Yes
Elionix	No	Yes	Yes	Yes
Heidelberg	No	Yes	Yes	Yes
Mask aligner	Yes	Yes	Yes	Yes
AJAs	Yes	Yes	Yes	Yes
e-gun	Yes	Yes	Yes	Yes
Edwards	Yes	Yes	Yes	Yes
ALD	Yes	Yes	Yes	Yes
Leica Sputter	Yes	Yes	Yes	Yes
JEOL 6230F	Yes	Yes	Yes	Yes
JEOL 7800F	No	Yes	Yes	Yes
TEM	No	Yes	Yes	Yes
Alphastep Tencor profilometer	Yes	Yes	Yes	Yes
Alpha_SE Ellipsometer	Yes	Yes	Yes	Yes
Sensofar	Yes	Yes	Yes	Yes
AFM	Yes	Yes	Yes	Yes
Süss scriber	Yes	Yes	Yes	Yes
Loomis scriber	No	No	No	No
RTA	Yes	Yes	Yes	Yes
Biorad	Yes	Yes	Yes	Yes
Plasma-preen asher	Yes	Yes	Yes	Yes
Diener asher	Yes	Yes	Yes	Yes
Spinners	Yes	Yes	Yes	Yes