Tools: Difference between revisions

Revision as of 11:26, 15 September 2020

A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please contact cleanroom@nbi.ku.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.

Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.

Tool list

Lithography	Thin film & III-Vs	Characterization	Other
Raith eLine Elionix EBL system Heidelberg LED writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards thermal evaporator Laurell spinners Cambridge ALD Leica sputter coater MBE	JEOL JSM-6320F JEOL JSM-7800F Raith eLine Philips TEM Tencor profilometer Alpha_SE Ellipsometer Sensofar optical profiler Olympus BX51M microscopes Bruker Dimension Icon AFM	Süss scriber Loomis scriber Dicing saw AccuThermo RTA Plasma-Preen asher Diener plasma asher FS bonder Präzitherm hotplates

Tool access requirement guidelines

	Bachelor	Master	PhD	Postdoc
eLine	No	Yes	Yes	Yes
Elionix	No	Yes	Yes	Yes
LED writer	No	Yes	Yes	Yes
Mask aligner	Yes	Yes	Yes	Yes

AJAs	Yes	Yes	Yes	Yes
E-gun	Yes	Yes	Yes	Yes
Edwards	Yes	Yes	Yes	Yes
ALD	Yes	Yes	Yes	Yes
Leica sputter	Yes	Yes	Yes	Yes

JEOL 6320F	Yes	Yes	Yes	Yes
JEOL 7800F	No	Yes	Yes	Yes
TEM	No	Yes	Yes	Yes
Profilometer	Yes	Yes	Yes	Yes
Ellipsometer	Yes	Yes	Yes	Yes
Sensofar	Yes	Yes	Yes	Yes
AFM	Yes	Yes	Yes	Yes

Manual scriber	Yes	Yes	Yes	Yes
Loomis scriber	No	No	No	No
RTA	Yes	Yes	Yes	Yes
Biorad	Yes	Yes	Yes	Yes
Microwave asher	Yes	Yes	Yes	Yes
Diener asher	Yes	Yes	Yes	Yes
Spinners	Yes	Yes	Yes	Yes

@@ Line 52: / Line 52: @@
 ! scope="col" width="20%" | Postdoc
 |-
-| style="text-align:right; padding-right:6px;" |  eLine
+| style="text-align:right; padding-right:6px;" |  [[Raith eLine|eLine]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #c6e0b4" | Yes
@@ Line 58: / Line 58: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Elionix
+| style="text-align:right; padding-right:6px;" | [[Elionix]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #c6e0b4" | Yes
@@ Line 64: / Line 64: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Heidelberg
+| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|LED writer]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #c6e0b4" | Yes
@@ Line 70: / Line 70: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Mask aligner
+| style="text-align:right; padding-right:6px;" | [[Süss mask aligner|Mask aligner]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 78: / Line 78: @@
 | style="padding-bottom:6px;" |
 |-
-| style="text-align:right; padding-right:6px;" | AJAs
+| style="text-align:right; padding-right:6px;" | [[AJA Systems|AJAs]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 84: / Line 84: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | e-gun
+| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator|E-gun]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 90: / Line 90: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Edwards
+| style="text-align:right; padding-right:6px;" | [[Edwards evaporator|Edwards]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 96: / Line 96: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | ALD
+| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 102: / Line 102: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Leica Sputter
+| style="text-align:right; padding-right:6px;" | [[Leica sputter coater|Leica sputter]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 110: / Line 110: @@
 | style="padding-bottom:6px;" |
 |-
-| style="text-align:right; padding-right:6px;" | JEOL 6230F
+| style="text-align:right; padding-right:6px;" | [[JEOL 6320F]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 116: / Line 116: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | JEOL 7800F
+| style="text-align:right; padding-right:6px;" | [[JEOL 7800F]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #c6e0b4" | Yes
@@ Line 122: / Line 122: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | TEM
+| style="text-align:right; padding-right:6px;" | [[Philips TEM|TEM]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #c6e0b4" | Yes
@@ Line 128: / Line 128: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Alphastep Tencor profilometer
+| style="text-align:right; padding-right:6px;" | [[Tencor profilometer|Profilometer]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 134: / Line 134: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Alpha_SE Ellipsometer
+| style="text-align:right; padding-right:6px;" | [[Ellipsometer]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 140: / Line 140: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Sensofar
+| style="text-align:right; padding-right:6px;" | [[Sensofar optical profiler|Sensofar]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 146: / Line 146: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | AFM
+| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 154: / Line 154: @@
 | style="padding-bottom:6px;" |
 |-
-| style="text-align:right; padding-right:6px;" | Süss scriber
+| style="text-align:right; padding-right:6px;" | [[Süss scriber|Manual scriber]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 160: / Line 160: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Loomis scriber
+| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
 | style="background-color: #ff9f9f" | No
 | style="background-color: #ff9f9f" | No
@@ Line 166: / Line 166: @@
 | style="background-color: #ff9f9f" | No
 |-
-| style="text-align:right; padding-right:6px;" | RTA
+| style="text-align:right; padding-right:6px;" | [[AccuThermo RTA|RTA]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 172: / Line 172: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Biorad
+| style="text-align:right; padding-right:6px;" | [[Biorad]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 178: / Line 178: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Plasma-preen asher
+| style="text-align:right; padding-right:6px;" | [[Plasma-Preen asher|Microwave asher]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 184: / Line 184: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Diener asher
+| style="text-align:right; padding-right:6px;" | [[Diener plasma asher|Diener asher]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes
@@ Line 190: / Line 190: @@
 | style="background-color: #c6e0b4" | Yes
 |-
-| style="text-align:right; padding-right:6px;" | Spinners
+| style="text-align:right; padding-right:6px;" | [[Laurell spinners|Spinners]]
 | style="background-color: #c6e0b4" | Yes
 | style="background-color: #c6e0b4" | Yes

Tools: Difference between revisions

Revision as of 11:26, 15 September 2020

Tool list

Tool access requirement guidelines

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