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* [[Cambridge ALD]] | * [[Cambridge ALD]] | ||
* [[Leica sputter coater]] | * [[Leica sputter coater]] | ||
* MBE | * [[MBE]] | ||
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* [[JEOL 6320F|JEOL JSM-6320F]] | * [[JEOL 6320F|JEOL JSM-6320F]] | ||
Revision as of 12:37, 11 September 2020
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. For all training requests, please contact cleanroom@nbi.ku.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Once the user has completed the training, they are given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
Tool access requirement guidelines
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| eLine | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| Heidelberg | No | Yes | Yes | Yes |
| Mask aligner | Yes | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| e-gun | Yes | Yes | Yes | Yes |
| Edwards | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica Sputter | Yes | Yes | Yes | Yes |
| JEOL 6230F | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | No | Yes | Yes | Yes |
| Alphastep Tencor profilometer | Yes | Yes | Yes | Yes |
| Alpha_SE Ellipsometer | Yes | Yes | Yes | Yes |
| Sensofar | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Süss scriber | Yes | Yes | Yes | Yes |
| Loomis scriber | No | No | No | No |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Plasma-preen asher | Yes | Yes | Yes | Yes |
| Diener asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |