Tool list
| Lithography |
Thin film & III-Vs |
Characterization |
Other
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Tool access
Only users that have met the necessary training requirements are allowed to use the cleanroom tools, including basic instruments such as hotplates and microscopes. Furthermore, some tools require a certain level of experience and academic qualification, as shown in the table below. For all training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday.
|
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Bachelor
|
Master
|
PhD
|
Postdoc
|
| Raith Eline
|
No
|
Yes
|
Yes
|
Yes
|
| Elionix
|
No
|
Yes
|
Yes
|
Yes
|
| Heidelberg
|
Yes
|
Yes
|
Yes
|
Yes
|
| Mask aligner
|
Yes
|
Yes
|
Yes
|
Yes
|
|
|
| AJAs
|
Yes
|
Yes
|
Yes
|
Yes
|
| e-gun
|
Yes
|
Yes
|
Yes
|
Yes
|
| Edwards
|
Yes
|
Yes
|
Yes
|
Yes
|
| Spinners
|
Yes
|
Yes
|
Yes
|
Yes
|
| ALD
|
Yes
|
Yes
|
Yes
|
Yes
|
| Leica
|
Yes
|
Yes
|
Yes
|
Yes
|
| MBE
|
No
|
No
|
Yes
|
Yes
|
|
|
| JEOL 6230F
|
Yes
|
Yes
|
Yes
|
Yes
|
| JEOL 7800F
|
No
|
Yes
|
Yes
|
Yes
|
| TEM
|
?
|
?
|
?
|
?
|
| Alphastep
|
?
|
?
|
?
|
?
|
| Sensofar
|
?
|
?
|
?
|
?
|
| Microscopes
|
?
|
?
|
?
|
?
|
| AFM
|
?
|
?
|
?
|
?
|
|
|
| Süss scriber
|
Yes
|
Yes
|
Yes
|
Yes
|
| Loomis scriber
|
No
|
No
|
Yes
|
Yes
|
| RTA
|
?
|
?
|
?
|
?
|
| Biorad
|
?
|
?
|
?
|
?
|
| µ-wave
|
?
|
?
|
?
|
?
|
| Denier asher
|
?
|
?
|
?
|
?
|
| Ball-bonder
|
?
|
?
|
?
|
?
|
| Hotplates
|
?
|
?
|
?
|
?
|