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Welcome to the NBI cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.

Tools	Safety	Fabrication	Booking	Training	About	MBE

Current tool status

Heidelberg LED writer	All good!
Raith eLine 30 kV	Tool down. Stage controller is being received next week [reassembling the tool on week 45]
Elionix 7000 100 kV	Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]
Elionix F-125 125kV	Annual service & gun fillament exchange. [down time: Weeks 45 and 46]
AJA1 (e-gun)	The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair [estimated return: Week 50]
AJA1 (milling and sputtering)	All good!
AJA2	All good!
Plassys Evaporator	All good!
E-Gun evaporator	All good!
ALD1	Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.
ALD2	All good! [Scheduled servicing of the scroll pump: Week 47]
FS bonder	All good! Please return the hex Wera screwdrivers. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
K&S bonder	All good!
Loomis scriber	Dual PC is not working, the tool is okay to use with a single operating PC
Dicing saw	All good!
AFM	System down. Troubleshooting in progress.

List updated: Thursday 30 Oct 2025