Tools
A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. Once the user has completed the training, s/he is given booking rights in the cleanroom booking system. However, after a certain period of inactivity on a given tool, the booking rights will expire and the user will need to be retrained in order to continue using the tool.
Some tools are reserved for more experienced users, or those who have reached certain academic qualifications, as shown in the table below.
For all training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Tool list
| Lithography | Thin film & III-Vs | Characterization | Other |
|---|---|---|---|
|
Tool access requirements
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| Raith Eline | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| Heidelberg | No | Yes | Yes | Yes |
| Mask aligner | Yes | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| e-gun | Yes | Yes | Yes | Yes |
| Edwards | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica sputtering system | Yes | Yes | Yes | Yes |
| MBE | No | No | Yes | Yes |
| JEOL 6230F | Yes | Yes | Yes | Yes |
| JEOL 7800F | No* | Yes | Yes | Yes |
| TEM | No* | Yes | Yes | Yes |
| Alphastep | Yes | Yes | Yes | Yes |
| Sensofar optical profiler | Yes | Yes | Yes | Yes |
| AFM | Yes | Yes | Yes | Yes |
| Süss scriber | Yes | Yes | Yes | Yes |
| Loomis scriber | No | No* | Yes | Yes |
| RTA | Yes | Yes | Yes | Yes |
| Biorad | Yes | Yes | Yes | Yes |
| Plasma-preen asher | Yes | Yes | Yes | Yes |
| Diener asher | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |