Tools

Tool list

Lithography	Thin film & III-Vs	Characterization	Other
Raith eLine Elionix EBL system Heidelberg LED writer Süss mask aligner	AJA Systems E-Gun evaporator Edwards thermal evaporator Laurell spinners Cambridge ALD Leica sputter coater MBE	JEOL JSM 6320F JEOL JSM 7800F Raith eLine Philips TEM Alphastep profilometer Sensofar optical profiler Olympus microscopes AFM	Süss scriber Loomis scriber AccuThermo RTA Biorad oven µ-wave plasma oven Denier RF-asher K&S Ball Bonder Präzitherm hotplates

Tool access

Only users that have met the necessary training requirements are allowed to use the cleanroom tools, including basic instruments such as hotplates and microscopes. Furthermore, some tools require a certain level of experience and academic qualification, as shown in the table below. For all training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday.

Access to all tools (even hotplates and microscopes) is contingent on

	Bachelor	Master	PhD	Postdoc
Raith Eline	No	Yes	Yes	Yes
Elionix	No	Yes	Yes	Yes
Heidelberg	Yes	Yes	Yes	Yes
Mask aligner	Yes	Yes	Yes	Yes
AJAs	Yes	Yes	Yes	Yes
e-gun	Yes	Yes	Yes	Yes
Edwards	Yes	Yes	Yes	Yes
Spinners	Yes	Yes	Yes	Yes
ALD	Yes	Yes	Yes	Yes
Leica	Yes	Yes	Yes	Yes
MBE	No	No	Yes	Yes
JEOL 6230F	Yes	Yes	Yes	Yes
JEOL 7800F	No	Yes	Yes	Yes
TEM	?	?	?	?
Alphastep	?	?	?	?
Sensofar	?	?	?	?
Microscopes	?	?	?	?
AFM	?	?	?	?
Süss scriber	Yes	Yes	Yes	Yes
Loomis scriber	No	No	Yes	Yes
RTA	?	?	?	?
Biorad	?	?	?	?
µ-wave	?	?	?	?
Denier asher	?	?	?	?
Ball-bonder	?	?	?	?
Hotplates	?	?	?	?