A prerequisite for using the cleanroom tools is that a cleanroom staff member has given the necessary instruction or training. This includes basic instruments such as hotplates and microscopes. Furthermore, some tools are reserved for more experienced users, or those who have reached certain academic qualifications, as shown in the table below. For all training requests, please contact cleanroom*nbi.dk, and a cleanroom staff member will typically respond within one workday. Do not contact individual staff members for training.
Tool list
| Lithography |
Thin film & III-Vs |
Characterization |
Other
|
|
|
|
|
|
Tool requirements
|
|
Bachelor
|
Master
|
PhD
|
Postdoc
|
| Raith Eline
|
No
|
Yes
|
Yes
|
Yes
|
| Elionix
|
No
|
Yes
|
Yes
|
Yes
|
| Heidelberg
|
Yes
|
Yes
|
Yes
|
Yes
|
| Mask aligner
|
Yes
|
Yes
|
Yes
|
Yes
|
|
|
| AJAs
|
Yes
|
Yes
|
Yes
|
Yes
|
| e-gun
|
Yes
|
Yes
|
Yes
|
Yes
|
| Edwards
|
Yes
|
Yes
|
Yes
|
Yes
|
| Spinners
|
Yes
|
Yes
|
Yes
|
Yes
|
| ALD
|
Yes
|
Yes
|
Yes
|
Yes
|
| Leica
|
Yes
|
Yes
|
Yes
|
Yes
|
| MBE
|
No
|
No
|
Yes
|
Yes
|
|
|
| JEOL 6230F
|
Yes
|
Yes
|
Yes
|
Yes
|
| JEOL 7800F
|
No
|
Yes
|
Yes
|
Yes
|
| TEM
|
?
|
?
|
?
|
?
|
| Alphastep
|
?
|
?
|
?
|
?
|
| Sensofar
|
?
|
?
|
?
|
?
|
| Microscopes
|
?
|
?
|
?
|
?
|
| AFM
|
?
|
?
|
?
|
?
|
|
|
| Süss scriber
|
Yes
|
Yes
|
Yes
|
Yes
|
| Loomis scriber
|
No
|
No
|
Yes
|
Yes
|
| RTA
|
?
|
?
|
?
|
?
|
| Biorad
|
?
|
?
|
?
|
?
|
| µ-wave
|
?
|
?
|
?
|
?
|
| Denier asher
|
?
|
?
|
?
|
?
|
| Ball-bonder
|
?
|
?
|
?
|
?
|
| Hotplates
|
?
|
?
|
?
|
?
|