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Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.

Tools	Safety	Fabrication	Booking	Training	About	MBE	Sustainability

Current tool status

Heidelberg LED writer	Cooling circulation pump will be replaced in week 11. The tool is available in the meantime.
Raith eLine 30 kV	All good!
Elionix 7000 100 kV	Maintenance: Gun exchange. expected date: Tue 10 Mar 2026
Elionix F-125 125 kV	All good!
AJA1	Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
AJA2	Concern about the deposition uniformity: Will be checked on Monday 9 of March
Plassys Evaporator	All good!
E-Gun evaporator	All good! The chamber is dedicated to In
ALD1	All good!
ALD2	Concern about the vacuum. Will be checked on week 11
FS bonder	All good!
K&S bonder	All good!
Loomis scriber	All good!
Dicing saw	All good!
AFM	All good!
JEOL JSM-7800F	All good!
JEOL JSM-7800F prime	All good!

List updated: Fri 6 Mar 2026