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Revision as of 11:50, 9 January 2026 by Harry (talk | contribs) (→Current tool status)
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Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV All good!
Elionix F-125 125 kV All good!
AJA1 (e-gun) The bellow of the e-gun has a vacuum leak. Currently is in factory for repair.[estimated return: Week 3]
AJA1 (milling and sputtering) All good!
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! Available materials In, Ni, SiOx,Au
ALD1 All good!
ALD2 All good!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime Turbo failure, service on February 2nd & 3rd

List updated: Fri 9 Jan 2026

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