Main Page

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.

Tools	Safety	Fabrication	Booking	Training	About	MBE	Sustainability

Current tool status

Heidelberg LED writer	All good!
Raith eLine 30 kV	All good!
Elionix 7000 100 kV	All good!
Elionix F-125 125 kV	Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 48]
AJA1 (e-gun)	The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
AJA1 (milling and sputtering)	All good!
AJA2	All good!
Plassys Evaporator	Al5(AlNQCP) is running low. The chamber will be opened Fri 14 Nov for material refill and maintenance
E-Gun evaporator	All good! Available materials In, Ni, SiOx
ALD1	All good!
ALD2	All good! [Scheduled servicing of the scroll pump: Week 47]
FS bonder	All good! Please return the hex Wera screwdrivers. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 47 - experiencing delivery delays]. Once we receive it back, we will set up a bondhead with Au wire!
K&S bonder	All good!
Loomis scriber	Dual PC is not working, the tool is okay to use with a single operating PC
Dicing saw	All good!
AFM	System down. Planning to send parts for repair. Estimated lead time: at least until week 50.
JEOL JSM-7800F	All good!
JEOL JSM-7800F prime	All good!

List updated: Fri 14 Nov 2025