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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | | style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | Annual service | ||
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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
Revision as of 09:46, 27 January 2026
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | Annual service |
| Elionix 7000 100 kV | All good! |
| Elionix F-125 125 kV | All good! |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair.[estimated return: Week 3] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx,Au |
| ALD1 | All good! |
| ALD2 | All good! |
| FS bonder | All good! Please return the hex Wera screwdrivers. |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | Turbo failure, service on February 2nd & 3rd |
List updated: Fri 9 Jan 2026