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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
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| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
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| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | | style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | ||
| style="background-color: # | | style="background-color: #FFD700" | Al5(AlNQCP) is running low. The chamber will be opened Fri 14 Nov for material refill and maintenance | ||
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| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | | style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | ||
| style="background-color: #c6e0b4" | All good! Available materials In | | style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx | ||
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | ||
| style="background-color: #FFD700" | | | style="background-color: #FFD700" | We have longer delays on the delivert of the new venting MAC valve [estimated service: Week 47]. The system can be used, but ask Harry to help you with loading/unloading if you have issues. | ||
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | ||
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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | | style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | ||
| style="background-color: #ff9f9f" | System down. Planning to send parts for repair. Estimated lead time: | | style="background-color: #ff9f9f" | System down. Planning to send parts for repair. Estimated lead time: at least until week 50. | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | ||
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''List updated: | ''List updated: Tue 11 Nov 2025'' | ||
Latest revision as of 09:36, 11 November 2025
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | All good! |
| Elionix F-125 125 kV | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 48] |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair. Scheduled for evaluation in factory: Week 45.[estimated return: Week 50] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | Al5(AlNQCP) is running low. The chamber will be opened Fri 14 Nov for material refill and maintenance |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx |
| ALD1 | We have longer delays on the delivert of the new venting MAC valve [estimated service: Week 47]. The system can be used, but ask Harry to help you with loading/unloading if you have issues. |
| ALD2 | All good! [Scheduled servicing of the scroll pump: Week 47] |
| FS bonder | All good! Please return the hex Wera screwdrivers. The primary bondhead (SN:004) is in the factory for servicing [estimated return: end of Week 46]. Once we receive it back, we will set up a bondhead with Au wire! |
| K&S bonder | All good! |
| Loomis scriber | Dual PC is not working, the tool is okay to use with a single operating PC |
| Dicing saw | All good! |
| AFM | System down. Planning to send parts for repair. Estimated lead time: at least until week 50. |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | All good! |
List updated: Tue 11 Nov 2025