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| Line 6: | Line 6: | ||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[Raith eLine]] | * [[Raith eLine]] | ||
* [[Elionix]] | * [[Elionix|Elionix EBL system]] | ||
* [[Heidelberg µPG 501|Heidelberg | * [[Heidelberg µPG 501|Heidelberg LED writer]] | ||
* Süss mask aligner | * Süss mask aligner | ||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[AJA Systems]] | * [[AJA Systems]] | ||
* E-Gun evaporator | * [[E-Gun evaporator]] | ||
* Edwards thermal evaporator | * [[Edwards thermal evaporator]] | ||
* | * [[Laurell spinners]] | ||
* ALD | * [[Cambridge ALD]] | ||
* [[Leica sputter coater]] | * [[Leica sputter coater]] | ||
* MBE | * MBE | ||
| Line 22: | Line 21: | ||
* [[JEOL 7800F|JEOL JSM 7800F]] | * [[JEOL 7800F|JEOL JSM 7800F]] | ||
* [[Raith eLine]] | * [[Raith eLine]] | ||
* TEM | * [[Philips TEM]] | ||
* Alphastep profilometer | * [[Alphastep profilometer]] | ||
* Sensofar optical profiler | * [[Sensofar optical profiler]] | ||
* Olympus microscopes | * [[Olympus microscopes]] | ||
* AFM | * [[AFM]] | ||
| style="width: 20%;" | | | style="width: 20%;" | | ||
* [[Süss scriber]] | * [[Süss scriber]] | ||
* Loomis scriber | * [[Loomis scriber]] | ||
* [[AccuThermo RTA]] | * [[AccuThermo RTA]] | ||
* Biorad oven | * [[Biorad oven]] | ||
* µ-wave plasma oven | * [[µ-wave plasma oven]] | ||
* Denier RF-asher | * [[Denier RF-asher]] | ||
* K&S Ball Bonder | * [[K&S Ball Bonder]] | ||
* Präzitherm hotplates | * [[Präzitherm hotplates]] | ||
|} | |} | ||
= Tool | = Tool access = | ||
{| cellspacing=0px style="text-align: center;" | {| cellspacing=0px style="text-align: center;" | ||
! scope="col" width="20%" align="right" | | ! scope="col" width="20%" align="right" | | ||
Revision as of 20:15, 29 November 2016
Tools
| Lithography | Thin film & III-V processing | Characterization | Other |
|---|---|---|---|
|
Tool access
| Bachelor | Master | PhD | Postdoc | |
|---|---|---|---|---|
| Raith Eline | No | Yes | Yes | Yes |
| Elionix | No | Yes | Yes | Yes |
| Heidelberg | Yes | Yes | Yes | Yes |
| Mask aligner | Yes | Yes | Yes | Yes |
| AJAs | Yes | Yes | Yes | Yes |
| e-gun | Yes | Yes | Yes | Yes |
| Edwards | Yes | Yes | Yes | Yes |
| Spinners | Yes | Yes | Yes | Yes |
| ALD | Yes | Yes | Yes | Yes |
| Leica | Yes | Yes | Yes | Yes |
| MBE | No | No | Yes | Yes |
| JEOL 6230F | Yes | Yes | Yes | Yes |
| JEOL 7800F | No | Yes | Yes | Yes |
| TEM | ? | ? | ? | ? |
| Alphastep | ? | ? | ? | ? |
| Sensofar | ? | ? | ? | ? |
| Microscopes | ? | ? | ? | ? |
| AFM | ? | ? | ? | ? |
| Süss scriber | Yes | Yes | Yes | Yes |
| Loomis scriber | No | No | Yes | Yes |
| RTA | ? | ? | ? | ? |
| Biorad | ? | ? | ? | ? |
| µ-wave | ? | ? | ? | ? |
| Denier asher | ? | ? | ? | ? |
| Ball-bonder | ? | ? | ? | ? |
| Hotplates | ? | ? | ? | ? |