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| style="padding-bottom:6px;" |
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]]
| style="background-color: #c6e0b4" | Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks
| style="background-color: #ff9f9f" | Tool maintenance: Baking in progress...
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #FFBF00" | No Au available
|-
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
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''List updated: Wed 28 Jan 2026''
''List updated: Tue 3 Jan 2026''

Revision as of 16:56, 3 February 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV Annual service
Elionix 7000 100 kV All good!
Elionix F-125 125 kV All good!
AJA1 Tool maintenance: Baking in progress...
AJA2 No Au available
Plassys Evaporator All good!
E-Gun evaporator All good! Available materials In, Ni, SiOx,Au
ALD1 All good!
ALD2 All good!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F Microscope downtime due to N2 gas supply. Expect to be operational on 4 February 2026.
JEOL JSM-7800F prime Turbo failure, service on February 2nd & 3rd

List updated: Tue 3 Jan 2026