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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
Line 31: Line 31:
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]]
| style="background-color: #c6e0b4" | Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
Line 75: Line 72:
|-
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #ff9f9f" | Turbo failure, service on February 2nd & 3rd
| style="background-color: #c6e0b4" | All good!
|}
|}


''List updated: Wed 28 Jan 2026''
''List updated: Fri 13 Feb 2026''
 
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Colour palette
#c6e0b4"  | All good!
#FFBF00" | Minor issue
#ff9f9f" | Tool maintenance / failure
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Latest revision as of 12:53, 13 February 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV All good!
Elionix F-125 125 kV All good!
AJA1 All good!
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! Available materials In, Ni, SiOx,Au
ALD1 All good!
ALD2 All good!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime All good!

List updated: Fri 13 Feb 2026