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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]] | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]] | ||
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair | | style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair.[estimated return: Week 3] | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]] | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]] | ||
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]] | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | | style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | | style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | ||
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx | | style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx,Au | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | ||
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | ||
| style="background-color: #c6e0b4" | All good | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
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| style="text-align:right; padding-right:6px;" | [[Loomis scriber]] | | style="text-align:right; padding-right:6px;" | [[Loomis scriber]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Dicing saw]] | | style="text-align:right; padding-right:6px;" | [[Dicing saw]] | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | Turbo failure, service on February 2nd & 3rd | ||
|} | |} | ||
''List updated: Fri | ''List updated: Fri 9 Jan 2026'' | ||
Latest revision as of 11:50, 9 January 2026
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | All good! |
| Elionix F-125 125 kV | All good! |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair.[estimated return: Week 3] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx,Au |
| ALD1 | All good! |
| ALD2 | All good! |
| FS bonder | All good! Please return the hex Wera screwdrivers. |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | Turbo failure, service on February 2nd & 3rd |
List updated: Fri 9 Jan 2026