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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | ||
Latest revision as of 14:10, 14 November 2025
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | All good! |
| Elionix F-125 125 kV | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 48] |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | Al5(AlNQCP) is running low. The chamber will be opened Fri 14 Nov for material refill and maintenance |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx |
| ALD1 | All good! |
| ALD2 | All good! [Scheduled servicing of the scroll pump: Week 47] |
| FS bonder | All good! Please return the hex Wera screwdrivers. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 47 - experiencing delivery delays]. Once we receive it back, we will set up a bondhead with Au wire! |
| K&S bonder | All good! |
| Loomis scriber | Dual PC is not working, the tool is okay to use with a single operating PC |
| Dicing saw | All good! |
| AFM | System down. Planning to send parts for repair. Estimated lead time: at least until week 50. |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | All good! |
List updated: Fri 14 Nov 2025