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'''Welcome to the NBI cleanroom wiki!'''
'''Welcome to the NBI Cleanroom wiki!'''


This site contains public information for the users of the cleanroom and related facilities. All items are available '''without login'''. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki].  
This site contains public information for the users of the cleanroom and related facilities. All items are available '''without login'''. Internal information that should not be disclosed can be posted at the password protected [https://wiki.nbi.ku.dk/qdevwiki/Main_Page QDev wiki].  
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{| style="width: 60%;" align="center"  
{| style="width: 60%;" align="center"  
|- style="text-align:center;"
|- style="text-align:center;"
| [[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]]|| [[File:Info_button.png|100px|link=About|About]]
|[[File:Tools_button.png|100px|link=Tools|Tools]] || [[File:Safety_button.png|100px|link=Safety|Safety]] || [[File:Fabrication_button.png|100px|link=Fabrication|Fabrication]] || [[File:Calendar_button.png|100px|link=http://cleanroom.brickhost.com/|Calendar]] || [[File:Training ico.png|100px|link=Training|Training]] || [[File:Info_button.png|100px|link=About|About]] || [[File:MBE.png|90px|link=MBE|MBE]] || [[File:sustain.png|90px|link=Sustainability|Sustainability]]
|- style="text-align:center;"
|- style="text-align:center;"
| Tools || Safety || Fabrication || Booking || Training|| About
| Tools || Safety || Fabrication || Booking || Training || About || MBE || Sustainability
|}
|}
==Current tool status==
{| cellspacing=0px style="text-align: left;"
|-
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="background-color: #ff9f9f" | Annual service
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="background-color: #c6e0b4" | All good!
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="background-color: #c6e0b4" | Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx,Au
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="background-color: #c6e0b4" | All good!
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''.
|-
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
| style="background-color: #c6e0b4" | All good!
|-
| style="padding-bottom:6px;" |
|-
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #c6e0b4"  | All good!
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
| style="background-color: #c6e0b4"  | All good!
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #ff9f9f" | Turbo failure, service on February 2nd & 3rd
|}
''List updated: Wed 28 Jan 2026''

Latest revision as of 09:12, 28 January 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV Annual service
Elionix 7000 100 kV All good!
Elionix F-125 125 kV All good!
AJA1 (e-gun) Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks
AJA1 (milling and sputtering) All good!
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! Available materials In, Ni, SiOx,Au
ALD1 All good!
ALD2 All good!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime Turbo failure, service on February 2nd & 3rd

List updated: Wed 28 Jan 2026

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