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==Current tool status==
==NEWS: NBI-Cleanroom Training Request Form==
Starting in July 2026, a standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form ([https://forms.office.com/e/b3PDKjsZ88?origin=lprLink NBI-Cleanroom Training Request Form]). Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities.


==NEWS: Sample Storage Box Label Policy==
Starting in July 2026, a new standard policy for labeling sample storage boxes has been implemented. As a minimum, each storage box must be labelled with user's name, research group or company, month and year the box was first used, and whether it contains III-V materials. In addition, all individual sample trays and wafer boxes must be labelled with sample ID and clearly indicate whether they contain III-V materials.
==Current Tool Status==
''List updated: Tue 1 July 2026''


{| cellspacing=0px style="text-align: left;"
{| cellspacing=0px style="text-align: left;"
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|-
|-
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="background-color: #ff9f9f" | Annual service
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #ff9f9f" | Service: Blanking aperture. Expected recovery date: Until further notice.
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]]
| style="background-color: #c6e0b4" | Almost good! The bellow is slowly outgassing, pressure will drop in the next weeks
| style="background-color: #FFBF00" | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
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|-
|-
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx,Au
| style="background-color: #c6e0b4" | All good! The chamber is dedicated to In  
|-
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
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|-
|-
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''.
| style="background-color: #c6e0b4" | All good!  
|-
|-
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
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|-
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #ff9f9f" | Turbo failure, service on February 2nd & 3rd
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[Talos F200i S/TEM|TEM]]
| style="background-color: #c6e0b4"  | All good!
|}
|}


''List updated: Wed 28 Jan 2026''
<!--
Colour palette
#c6e0b4"  | All good!
#FFBF00" | Minor issue
#ff9f9f" | Tool maintenance / failure
-->

Latest revision as of 07:31, 16 July 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


NEWS: NBI-Cleanroom Training Request Form

Starting in July 2026, a standardized training request form has been introduced. The new system will allow users to request training for multiple instruments using a single form (NBI-Cleanroom Training Request Form). Following submission of the request form, email communication will continue to be used for scheduling and coordinating training activities.

NEWS: Sample Storage Box Label Policy

Starting in July 2026, a new standard policy for labeling sample storage boxes has been implemented. As a minimum, each storage box must be labelled with user's name, research group or company, month and year the box was first used, and whether it contains III-V materials. In addition, all individual sample trays and wafer boxes must be labelled with sample ID and clearly indicate whether they contain III-V materials.

Current Tool Status

List updated: Tue 1 July 2026

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV Service: Blanking aperture. Expected recovery date: Until further notice.
Elionix F-125 125 kV All good!
AJA1 Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! The chamber is dedicated to In
ALD1 All good!
ALD2 All good!
FS bonder All good!
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime All good!
TEM All good!


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