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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: #ff9f9f" | | | style="background-color: #ff9f9f" | Service: Blanking aperture. Expected recovery date: end-of-June 2026. | ||
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| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | Annual preventive maintenance. Expected recovery date: 29th May 2026. | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | ||
Latest revision as of 07:51, 28 May 2026
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | Service: Blanking aperture. Expected recovery date: end-of-June 2026. |
| Elionix F-125 125 kV | All good! |
| AJA1 | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding. |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! The chamber is dedicated to In |
| ALD1 | All good! |
| ALD2 | All good! |
| FS bonder | All good! |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | Annual preventive maintenance. Expected recovery date: 29th May 2026. |
| JEOL JSM-7800F prime | All good! |
| TEM | All good! |
List updated: Tue 14 Apr 2026