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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | | style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | Service: Blanking aperture. Expected recovery date: end-of-June 2026. | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
| Line 31: | Line 31: | ||
| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]] | ||
| style="background-color: # | | style="background-color: #FFBF00" | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding. | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[AJA systems| | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | | style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | ||
| Line 44: | Line 41: | ||
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| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | | style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! The chamber is dedicated to In | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | ||
| Line 55: | Line 52: | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[FS bonder]] | | style="text-align:right; padding-right:6px;" | [[FS bonder]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[K&S bonder]] | | style="text-align:right; padding-right:6px;" | [[K&S bonder]] | ||
| Line 72: | Line 69: | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | ||
| style="background-color: #ff9f9f" | Annual preventive maintenance. Expected recovery date: 29th May 2026. | |||
|- | |||
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | |||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[ | | style="text-align:right; padding-right:6px;" | [[Talos F200i S/TEM|TEM]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|} | |} | ||
''List updated: | ''List updated: Tue 14 Apr 2026'' | ||
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Colour palette | |||
#c6e0b4" | All good! | |||
#FFBF00" | Minor issue | |||
#ff9f9f" | Tool maintenance / failure | |||
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Latest revision as of 07:51, 28 May 2026
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | Service: Blanking aperture. Expected recovery date: end-of-June 2026. |
| Elionix F-125 125 kV | All good! |
| AJA1 | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding. |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! The chamber is dedicated to In |
| ALD1 | All good! |
| ALD2 | All good! |
| FS bonder | All good! |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | Annual preventive maintenance. Expected recovery date: 29th May 2026. |
| JEOL JSM-7800F prime | All good! |
| TEM | All good! |
List updated: Tue 14 Apr 2026