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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="background-color: #ff9f9f" | Annual service
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #ff9f9f" | Maintenance: Gun exchange. expected date: Fri 27 Mar 2026
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair.[estimated return: Week 3]
| style="background-color: #FFBF00" | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.  
|-
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
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|-
|-
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx,Au
| style="background-color: #c6e0b4" | All good! The chamber is dedicated to In  
|-
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
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| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''.
| style="background-color: #c6e0b4" | All good!  
|-
|-
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
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|-
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #ff9f9f" | Turbo failure, service on February 2nd & 3rd
| style="background-color: #c6e0b4" | All good!
|}
|}


''List updated: Fri 9 Jan 2026''
''List updated: Wed 11 Mar 2026''
 
<!--
Colour palette
#c6e0b4"  | All good!
#FFBF00" | Minor issue
#ff9f9f" | Tool maintenance / failure
-->

Latest revision as of 16:34, 24 March 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV Maintenance: Gun exchange. expected date: Fri 27 Mar 2026
Elionix F-125 125 kV All good!
AJA1 Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! The chamber is dedicated to In
ALD1 All good!
ALD2 All good!
FS bonder All good!
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime All good!

List updated: Wed 11 Mar 2026