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| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]] | | style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]] | ||
| style="background-color: # | | style="background-color: #FFBF00" | Cooling circulation pump will be replaced in week 11. The tool is available in the meantime. | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | | style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: # | | style="background-color: #ff9f9f" | Maintenance: Gun exchange. expected date: Fri 13 Mar 2026 | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]] | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]] | ||
| style="background-color: # | | style="background-color: #FFBF00" | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding. | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]] | | style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]] | ||
| style="background-color: #FFBF00" | | | style="background-color: #FFBF00" | Concern about the deposition uniformity: Will be checked on Monday 9 of March | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | | style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]] | ||
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| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | | style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! The chamber is dedicated to In | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]] | ||
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | | style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]] | ||
| style="background-color: # | | style="background-color: #FFBF00" | Concern about the vacuum. Will be checked on week 12 | ||
|- | |- | ||
| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[FS bonder]] | | style="text-align:right; padding-right:6px;" | [[FS bonder]] | ||
| style="background-color: #c6e0b4" | All good! | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[K&S bonder]] | | style="text-align:right; padding-right:6px;" | [[K&S bonder]] | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|- | |- | ||
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
|} | |} | ||
''List updated: | ''List updated: Wed 11 Mar 2026'' | ||
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Colour palette | |||
#c6e0b4" | All good! | |||
#FFBF00" | Minor issue | |||
#ff9f9f" | Tool maintenance / failure | |||
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Latest revision as of 16:00, 11 March 2026
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | Cooling circulation pump will be replaced in week 11. The tool is available in the meantime. |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | Maintenance: Gun exchange. expected date: Fri 13 Mar 2026 |
| Elionix F-125 125 kV | All good! |
| AJA1 | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding. |
| AJA2 | Concern about the deposition uniformity: Will be checked on Monday 9 of March |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! The chamber is dedicated to In |
| ALD1 | All good! |
| ALD2 | Concern about the vacuum. Will be checked on week 12 |
| FS bonder | All good! |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | All good! |
List updated: Wed 11 Mar 2026