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| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]]
| style="text-align:right; padding-right:6px;" | [[Heidelberg µPG 501|Heidelberg LED writer]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #FFBF00" | Cooling circulation pump will be replaced in week 11. The tool is available in the meantime.
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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #ff9f9f" | Maintenance: Gun exchange. expected date: Fri 13 Mar 2026
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| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 48]
| style="background-color: #c6e0b4" | All good!
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1]]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
| style="background-color: #FFBF00" | Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.  
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="background-color: #c6e0b4" | All good!
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #FFBF00" | Concern about the deposition uniformity: Will be checked on Monday 9 of March
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| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="background-color: #c6e0b4" | All good! Al5(AlNQCP) is refilled and melted
| style="background-color: #c6e0b4" | All good!
|-
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| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx
| style="background-color: #c6e0b4" | All good! The chamber is dedicated to In  
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
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| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="background-color: #c6e0b4" | All good! Scroll pump tip seal service is done!
| style="background-color: #FFBF00" | Concern about the vacuum. Will be checked on week 12
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
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| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: Week 47 - experiencing delivery delays]. Once we receive it back, we will set up a bondhead with Au wire!
| style="background-color: #c6e0b4" | All good!  
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| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
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| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="text-align:right; padding-right:6px;" | [[Loomis scriber]]
| style="background-color: #FFD700" | Dual PC is not working, the tool is okay to use with a single operating PC
| style="background-color: #c6e0b4" | All good!
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| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
| style="text-align:right; padding-right:6px;" | [[Dicing saw]]
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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #ff9f9f"  | System down. Planning to send parts for repair. Estimated lead time: at least until week 50.
| style="background-color: #c6e0b4"  | All good!
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
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''List updated: Fri 14 Nov 2025''
''List updated: Wed 11 Mar 2026''
 
<!--
Colour palette
#c6e0b4"  | All good!
#FFBF00" | Minor issue
#ff9f9f" | Tool maintenance / failure
-->

Latest revision as of 16:00, 11 March 2026

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer Cooling circulation pump will be replaced in week 11. The tool is available in the meantime.
Raith eLine 30 kV All good!
Elionix 7000 100 kV Maintenance: Gun exchange. expected date: Fri 13 Mar 2026
Elionix F-125 125 kV All good!
AJA1 Minor issue with the on/off button of the Carrera FerroTech. Please contact cleanroom if the button isn't responding.
AJA2 Concern about the deposition uniformity: Will be checked on Monday 9 of March
Plassys Evaporator All good!
E-Gun evaporator All good! The chamber is dedicated to In
ALD1 All good!
ALD2 Concern about the vacuum. Will be checked on week 12
FS bonder All good!
K&S bonder All good!
Loomis scriber All good!
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime All good!

List updated: Wed 11 Mar 2026


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