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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 48]
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair. Scheduled for evaluation in factory: Week 45.[estimated return: Week 50]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
|-
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA2]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="background-color: #FFD700" | Al5(AlNQCP) is running low. The chamber will be opened Fri 14 Nov for material refill and maintenance
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx,Au
|-
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="background-color: #FFD700" | We have longer delays on the delivert of the new venting MAC valve [estimated service: Week 47]. The system can be used, but ask Harry to help you with loading/unloading if you have issues.
| style="background-color: #c6e0b4" | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="background-color: #c6e0b4" | All good! [Scheduled servicing of the scroll pump: Week 47]
| style="background-color: #c6e0b4" | All good!
|-
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
|-
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| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: end of Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''.
|-
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| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #ff9f9f"  | System down. Planning to send parts for repair. Estimated lead time: at least until week 50.
| style="background-color: #c6e0b4"  | All good!
|-
|-
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #ff9f9f" | Turbo failure
|}
|}


''List updated: Tue 11 Nov 2025''
''List updated: Thu 4 Dec 2025''

Latest revision as of 09:24, 15 December 2025

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV All good!
Elionix F-125 125 kV All good!
AJA1 (e-gun) The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
AJA1 (milling and sputtering) All good!
AJA2 All good!
Plassys Evaporator All good!
E-Gun evaporator All good! Available materials In, Ni, SiOx,Au
ALD1 All good!
ALD2 All good!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber Dual PC is not working, the tool is okay to use with a single operating PC
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime Turbo failure

List updated: Thu 4 Dec 2025

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