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| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]] | ||
| style="background-color: # | | style="background-color: #FEDF00" | Current is low (250pA), it is recommended not to use the system [21 Nov 2025] | ||
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| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | | style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]] | ||
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and | | style="background-color: #ff9f9f" | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49] | ||
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| style="padding-bottom:6px;" | | | style="padding-bottom:6px;" | | ||
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| style="text-align:right; padding-right:6px;" | [[FS bonder]] | | style="text-align:right; padding-right:6px;" | [[FS bonder]] | ||
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. | | style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. | ||
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| style="text-align:right; padding-right:6px;" | [[K&S bonder]] | | style="text-align:right; padding-right:6px;" | [[K&S bonder]] | ||
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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | | style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]] | ||
| style="background-color: # | | style="background-color: #c6e0b4" | All good! | ||
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | | style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]] | ||
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''List updated: | ''List updated: Fri 21 Nov 2025'' | ||
Latest revision as of 09:29, 21 November 2025
Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | Current is low (250pA), it is recommended not to use the system [21 Nov 2025] |
| Elionix F-125 125 kV | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49] |
| AJA1 (e-gun) | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48] |
| AJA1 (milling and sputtering) | All good! |
| AJA2 | All good! |
| Plassys Evaporator | All good! Al5(AlNQCP) is refilled and melted |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx |
| ALD1 | All good! |
| ALD2 | All good! Scroll pump tip seal service is done! |
| FS bonder | All good! Please return the hex Wera screwdrivers. |
| K&S bonder | All good! |
| Loomis scriber | Dual PC is not working, the tool is okay to use with a single operating PC |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | All good! |
List updated: Fri 21 Nov 2025