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| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="text-align:right; padding-right:6px;" | [[Raith eLine|Raith eLine 30 kV]]
| style="background-color: #ff9f9f" | Tool down. Stage controller is being received next week [reassembling the tool on week 45]
| style="background-color: #c6e0b4" | All good!
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|-
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_7000|Elionix 7000 100 kV]]
| style="background-color: #FFD700" | Waiting for a quotation for new Dovetails on multipiece stage holder. [estimated service: Week 45]
| style="background-color: #FEDF00" | Current is low (250pA), it is recommended not to use the system [21 Nov 2025]
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| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="text-align:right; padding-right:6px;" | [[Elionix_F-125|Elionix F-125 125 kV]]
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. [down time: Weeks 45 and 46]
| style="background-color: #ff9f9f" | Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49]
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (e-gun)]]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak (verified with He test). Has been sent to the US for repair. Scheduled for evaluation in factory: Week 45.[estimated return: Week 50]
| style="background-color: #ff9f9f" | The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
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| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
| style="text-align:right; padding-right:6px;" | [[AJA systems|AJA1 (milling and sputtering)]]
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| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="text-align:right; padding-right:6px;" | [[Plassys Evaporator]]
| style="background-color: #c6e0b4" | All good!
| style="background-color: #c6e0b4" | All good! Al5(AlNQCP) is refilled and melted
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| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="text-align:right; padding-right:6px;" | [[E-Gun evaporator]]
| style="background-color: #c6e0b4" | All good! Available materials In (x2), SiOx
| style="background-color: #c6e0b4" | All good! Available materials In, Ni, SiOx
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|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD1]]
| style="background-color: #FFD700" | Waiting for a new venting MAC valve from buch & holm [estimated service: Week 45]. System can be used but ask Harry to help you with loading if you have issues.
| style="background-color: #c6e0b4" | All good!
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|-
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="text-align:right; padding-right:6px;" | [[Cambridge ALD|ALD2]]
| style="background-color: #c6e0b4" | All good! [Scheduled servicing of the scroll pump: Week 47]
| style="background-color: #c6e0b4" | All good! Scroll pump tip seal service is done!
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| style="padding-bottom:6px;" |
| style="padding-bottom:6px;" |
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| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="text-align:right; padding-right:6px;" | [[FS bonder]]
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''. The primary bondhead (SN:004) is in the factory for servicing [estimated return: end of Week 46]. Once we receive it back, we will set up a bondhead with Au wire!
| style="background-color: #c6e0b4" | All good! ''' Please return the hex Wera screwdrivers'''.
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| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
| style="text-align:right; padding-right:6px;" | [[K&S bonder]]
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| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="text-align:right; padding-right:6px;" | [[Bruker Dimension Icon AFM|AFM]]
| style="background-color: #ff9f9f"  | System down. Troubleshooting in progress.
| style="background-color: #c6e0b4"  | All good!
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F]]
| style="background-color: #c6e0b4"  | All good!
| style="background-color: #c6e0b4"  | All good!
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| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800Fprime]]
| style="text-align:right; padding-right:6px;" | [[JEOL 7800F|JEOL JSM-7800F prime]]
| style="background-color: #c6e0b4"  | All good!
| style="background-color: #c6e0b4"  | All good!
|}
|}


''List updated: Wed 5 Nov 2025''
''List updated: Fri 21 Nov 2025''

Latest revision as of 09:29, 21 November 2025

Welcome to the NBI Cleanroom wiki!

This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.


Tools Safety Fabrication Calendar Training About MBE Sustainability
Tools Safety Fabrication Booking Training About MBE Sustainability


Current tool status

Heidelberg LED writer All good!
Raith eLine 30 kV All good!
Elionix 7000 100 kV Current is low (250pA), it is recommended not to use the system [21 Nov 2025]
Elionix F-125 125 kV Annual service & gun fillament exchange. An accident happened to the filament chamber, so need more service time [down time: Weeks 45 and 49]
AJA1 (e-gun) The bellow of the e-gun has a vacuum leak. Currently is in factory for repair (Week 46).[estimated return: Week 48]
AJA1 (milling and sputtering) All good!
AJA2 All good!
Plassys Evaporator All good! Al5(AlNQCP) is refilled and melted
E-Gun evaporator All good! Available materials In, Ni, SiOx
ALD1 All good!
ALD2 All good! Scroll pump tip seal service is done!
FS bonder All good! Please return the hex Wera screwdrivers.
K&S bonder All good!
Loomis scriber Dual PC is not working, the tool is okay to use with a single operating PC
Dicing saw All good!
AFM All good!
JEOL JSM-7800F All good!
JEOL JSM-7800F prime All good!

List updated: Fri 21 Nov 2025

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