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Welcome to the NBI Cleanroom wiki!
This site contains public information for the users of the cleanroom and related facilities. All items are available without login. Internal information that should not be disclosed can be posted at the password protected QDev wiki.
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| Tools | Safety | Fabrication | Booking | Training | About | MBE | Sustainability |
Current tool status
| Heidelberg LED writer | All good! |
| Raith eLine 30 kV | All good! |
| Elionix 7000 100 kV | All good! |
| Elionix F-125 125 kV | All good! |
| AJA1 | Tool maintenance: Baking in progress... |
| AJA2 | All good! |
| Plassys Evaporator | All good! |
| E-Gun evaporator | All good! Available materials In, Ni, SiOx,Au |
| ALD1 | All good! |
| ALD2 | All good! |
| FS bonder | All good! Please return the hex Wera screwdrivers. |
| K&S bonder | All good! |
| Loomis scriber | All good! |
| Dicing saw | All good! |
| AFM | All good! |
| JEOL JSM-7800F | All good! |
| JEOL JSM-7800F prime | All good! |
List updated: Thu 5 Jan 2026