Main public logs

Combined display of all available logs of cleanroom. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 16:22, 10 April 2026 Chenglee talk contribs created page File:Talos F200i.jpg
• 16:22, 10 April 2026 Chenglee talk contribs uploaded File:Talos F200i.jpg
• 16:17, 10 April 2026 Chenglee talk contribs uploaded a new version of File:Tool Philips TEM.jpg
• 08:12, 9 April 2026 Harry talk contribs created page Recommended parameters for EBL (Created page with "= Cleanroom recommendations= {| class="wikitable" |+125 kV |- |Resist |Si |InAs^UC |InP^UC |GaAs^UC |SiGe |- |A2 |1000 |700 |? |? |? |- |A4 |1200-1300 <ref name="Kringhoej" /> |700 |900 <ref name="Hertel" /> |630 |? |- |A6 |1200 |800 |900-920 <ref name="Hertel" /> |760 |? |- |EL6 |? |? |? |? |? |- |EL9 |450-500 <ref name="Kringhoej">[https://nbi.ku.dk/english/theses/phd-theses/anders-kringhoej/Anders_Kringhoej_P...")
• 13:05, 8 April 2026 Harry talk contribs created page Remote access and N-Drive (Created page with "= Requests for N-drive and remote access = All the requests are handled via the KUIT webpage. Log in with your credentials at the following webpage [https://identity.ku.dk identity.ku.dk]. * Click on <code> Manage user access</code> * <code> Select Users</code> : find your name and click next * Search: ** <code>SGT-FORSK_S4_NBI_CLEANROOM-USER</code> for remote access ** <code>N-SCI-NBI-Cleanroom-W</code> for N-Drive access : ''if you cannot see one of the above options...")
• 12:57, 8 April 2026 Harry talk contribs created page Cleanroom computers (Created page with "There is a number of PCs connected to cleanroom tools. Cleanroom staff is responsible for those. They are used to control fabrication related systems and/or transfer data between them and N-drive. Do not use flash drives or other removable media.")
• 12:53, 8 April 2026 Harry talk contribs created page Design computers (Created page with "= Design PCs = There are '''four''' common computers at QDev/NBI cleanroom dedicated to CAD and EBL prep work, so-called ''Design PCs'', named Design 5 through 8. They are located in '''321'''. Please be mindful that a lot of other people want to use them. Booking is '''mandatory''' on the Booking Calendar, schedule ''3rd Design'', regardless of whether the work is performed locally or remotely. Clean up after yourself -- do not leave windows open and programs ru...")
• 17:26, 17 February 2026 Harry talk contribs created page File:Design phidl.png
• 17:26, 17 February 2026 Harry talk contribs uploaded File:Design phidl.png
• 17:01, 17 February 2026 Harry talk contribs created page Design template for lithography training (Created page with "We recommend using a combination of the following tools for designing devices: ; Klayout or CleWin (only for Windows) ; [Phidl] (python-based) ; Copilot (great tool to boost your productivity)")
• 14:07, 11 November 2025 Harry talk contribs created page File:CH32N4Zr.png
• 14:07, 11 November 2025 Harry talk contribs uploaded File:CH32N4Zr.png
• 15:07, 10 November 2025 Zhe talk contribs created page File:F125.jpg
• 15:07, 10 November 2025 Zhe talk contribs uploaded File:F125.jpg
• 15:06, 10 November 2025 Zhe talk contribs reverted File:Tool Elionix.jpg to an old version (Reverted to version as of 14:04, 5 December 2016 (UTC))
• 15:01, 10 November 2025 Zhe talk contribs uploaded a new version of File:Tool Elionix.jpg
• 14:59, 10 November 2025 Zhe talk contribs created page Elionix F-125 (Created page with "{{Infobox tool |image = Tool Elionix.jpg |toolfullname = Elionix F125 |website = http://www.elionix.co.jp/english/ |company = ELIONIX INC. |description = Electron beam lithography system |location = 01.K03 |primary = Zhe |secondary = Harry }} Elionix F125 is a 125 kV acceleration electron beam lithography tool. == Tool Specification == * Acceleration voltage 50,75,100,125 kV * Minimum beam diameter - 1.8 nm * Beam current - 100 pA to 100nA * Field Size - Min 100 um Ma...")
• 15:49, 5 November 2025 Harry talk contribs created page File:Exiting proceedure V25 2.pdf
• 15:49, 5 November 2025 Harry talk contribs uploaded File:Exiting proceedure V25 2.pdf
• 09:09, 5 November 2025 Martin talk contribs created page File:Sustain.png (sustainability)
• 09:09, 5 November 2025 Martin talk contribs uploaded File:Sustain.png (sustainability)
• 12:47, 11 September 2025 Harry talk contribs created page File:Screw bonder.png
• 12:47, 11 September 2025 Harry talk contribs uploaded File:Screw bonder.png
• 08:51, 10 September 2025 Harry talk contribs created page File:Tools Plassys.jpg
• 08:51, 10 September 2025 Harry talk contribs uploaded File:Tools Plassys.jpg
• 09:19, 9 September 2025 Harry talk contribs created page Probe station (Created page with "In Qdev/ NBI cleanroom there are two probe stations for electrical characterisation. One on the 1st floor 03-1-111 (next to Qdev lounge) and one on the basement 03-K-08A (characterisation room with SEM and AFM). * '''1st floor probe station''': 2 probes and a Sysdey motherboard with 96 DC lines. It is connected to a He compressor, giving the possibility to reach down to ~4 K. * '''Basement probe station''': 6 probes and a pump cart connected to the chamber. Both tools...")
• 15:40, 8 September 2025 Harry talk contribs created page File:Dosdonts.pdf
• 15:40, 8 September 2025 Harry talk contribs uploaded File:Dosdonts.pdf
• 15:33, 8 September 2025 Harry talk contribs created page File:Detailed introduction schedule.pdf
• 15:33, 8 September 2025 Harry talk contribs uploaded File:Detailed introduction schedule.pdf
• 15:21, 8 September 2025 Harry talk contribs created page File:Cleanroom safety authorization checklist 2025.pdf
• 15:21, 8 September 2025 Harry talk contribs uploaded File:Cleanroom safety authorization checklist 2025.pdf
• 14:26, 8 September 2025 Harry talk contribs created page K&S bonder (Created page with "{{Infobox tool |image = Tools KS bonder.jpg |toolfullname = K&S Inseto MPP 4523 |serial number = 610337 |website = https://www.https://www.inseto.com/ |company = inseto |description = Manual Fine Wire Bonder |location = 2nd floor lab (03.2.213) |primary = Harry |secondary = Nader }} K&S Bonder MPP 4523 is a manual bonder. It belongs to the 4500 Series Manual Fine Wire Bonder of inseto. Users typically use it to bond III/Vs with a Au wire to PCB daughterboards.")
• 13:53, 8 September 2025 Harry talk contribs created page File:AR 300-80 info.pdf
• 13:53, 8 September 2025 Harry talk contribs uploaded File:AR 300-80 info.pdf
• 13:53, 8 September 2025 Harry talk contribs created page Adhesion promoter AR 300-80 NEW (Created page with "We stock AR 300-80 adhesion promoter in the cleanroom, which is recommended if you have delamination issues. The promoter works with Si (SiO2) and other III-V semiconductors. We've tested it on GaSb with very nice results. * AR 300-80 info sheet. * Material safety data sheet. Recommended processing instructions: * Spin coat a clean chip with the adhesion promoter at 4000 rpm for 45-60 s. The manufacturer states...")
• 12:32, 8 September 2025 Harry talk contribs created page Ga removal from backside of GaAs wafers (Created page with "When receiving GaAs wafers, they often come with a layer of gallium on the backside. This layer has turned out to cause quite some troubles, as it introduces an uneven surface on the backside of the wafers. The rough gallium on the backside tends to give high sample inclination and makes it difficult to handle small samples. You can request the growers to remove this Ga layer before shipping. Meanwhile, you need to remove the Ga from the wafers. =Techniques from John W...")
• 12:19, 8 September 2025 Harry talk contribs created page File:AJA1 Al.jpg
• 12:19, 8 September 2025 Harry talk contribs uploaded File:AJA1 Al.jpg
• 12:19, 8 September 2025 Harry talk contribs created page File:AJA1 Au.jpg
• 12:19, 8 September 2025 Harry talk contribs uploaded File:AJA1 Au.jpg
• 12:15, 8 September 2025 Harry talk contribs created page File:Milling.jpg
• 12:15, 8 September 2025 Harry talk contribs uploaded File:Milling.jpg
• 10:05, 8 September 2025 Harry talk contribs created page Preparation of solutions (Created page with "=1M Citric acid solution= #Citric acid in powder form is kept in the cleanroom hallway. #Citric acid is solution is kept in dedicated bottles in CR1 cupboard(by the spin coater) ==Preparation of the bottle== # Clean the bottle with MQ water, multiple times # Take 1L MQ water in this bottle # Keep the bottle on Hot plate @ 85deg # Keep magnetic stirrer running # Take 193gm of Citric acid powder by using weighing balance accurately. (This is very important to weigh accura...")
• 10:02, 8 September 2025 Harry talk contribs created page File:AR-P 6200 MSDS.pdf
• 10:02, 8 September 2025 Harry talk contribs uploaded File:AR-P 6200 MSDS.pdf
• 10:02, 8 September 2025 Harry talk contribs created page File:AR-P 6200 info.pdf
• 10:02, 8 September 2025 Harry talk contribs uploaded File:AR-P 6200 info.pdf
• 10:00, 8 September 2025 Harry talk contribs created page AR-P 6200 (CSAR) (Created page with "Some users are experimenting with AR-P 6200 (CSAR 62) from ALLRESIST GmbH as an alternative to ZEP resists. This page contains information on the resist and the process recommended by Shiv. Documents from the supplier: * AR-P 6200 (CSAR 62) info sheet. * Material safety data sheet. We have the following resist solution stocked in the cleanroom: {| class="wikitable" |+CSAR attributes |- |'''CSAR dilutions''' |''...")
• 09:55, 8 September 2025 Harry talk contribs created page File:MIF etch.jpg