AJA service

AJA systems maintenance is described here

Maintenance

Standard maintenance

1. Log cryo temp, base pressure.
2. Close cryo gate valve.
3. Turn off ion gauge.
4. Open loadlock gate valve.
5. Turn off loadlock turbo.

   While venting:

   • Unscrew right port with the linear crucible drive using two 9/16" wrenches.
   • Unscrew lid if you intend to open it.
   • Above 1e0 Torr loadlock pressure slowly open the vent nitrogen needle valve in front of the chamber.
6. At atmosphere: start stopwatch.
7. Pull out right port, open e-beam shutter.
8. For each crucible:
   • Wipe target metal surface with wipe
   • Weigh with digital scale
     • W crucible weighs ~120 g
     • Intermetallic crucible ~20 g
     • FabMate crucible ~12 g
     • Gold pellets <80 g, 40-45 g for half
     • Al pellets 6-7 g
     • Top up target material if needed, log amount.
9. If Sensor Life < 70% change the QCM. You can do this by sticking your hand through the loadlock. Be careful not to touch the mirror.
   • AJA1: gold plated 6 MHz. There are two. Sensor 2 is towards the end of the assembly. It is a bit tricky to get out, even with the sensor shutter open.
   • AJA2: silver plated 6 MHz (doesn't fail immediately during Pt evaporation)
10. Push the linear drive back inside, screw the nuts back on the bolts
11. Check if you can see the crucible in the mirror. If not:
    1. Attach chain to only one lid hook. Pull with ceiling motor for 20 mins
    2. Once the lid is open then lower the lid and lift with all three hooks
    3. Check if the quarter silicon wafer has started to delaminate. If so, peel off and reuse if possible. If it is not reflective enough, replace with clean quarter wafer.
    4. Adjust the clamp holding the mirror so that you can see the crucible through the port with LED light.
    5. Close lid, do not tighten screws/nuts
12. Start pumping, log time at atmosphere, tighten the nuts on the crucible linear drive
13. Close vent needle valve (not too tight!)
14. If loadlock pressure goes below 1e-1 Torr, there are no obvious leaks
15. After 30-60 mins check pressure. If <1e-4 Torr, turn on ion gauge
16. Open cryo gate valve at own discretion. Turbo helps pumping down to ~1e-6 Torr. At lower pressures loadlock gate valve should be closed and only cryo should be open to the main chamber.
17. Write a message to the users!

Cryo pump regeneration

1. Close cryo VAT valve ( Adaptive pressure controller ) .
2. Open the loadloack valve.
3. Open Turbo is pumping the main chamber
4. Turn off cryo (on the wall behind the tool). Just press and release switch .
5. Open nitrogen vent valve on the back left of the cryo.
6. Let warm to max T (~285 K), takes ~1 hour
7. Close nitrogen vent valve
8. Close roughing pump to turbo (screw valve under the loadlock turbo)
9. Open roughing to cryo (screw valve next to cryo)
10. Wait 20 mins to rough pump cryo
11. Open roughing to turbo
12. Turn on cryo ( wall switch) . Please check compressor as well .
13. Wait ~60 mins to get between 200-150 K
14. Close roughing to cryo
15. Wait until min T. Must be below 20 K (2-3 hours at 2 K/min)

    If does not go down below 20 K, replace cryo with spare unit. Return cryo for repair/refurb to Edwards Vacuum. Contacts on the internal QDev wiki

16. Close loadlock
17. Open cryo VAT valve

Phase II J software configurations

The standard Phase II J software configurations on the systems are:

AJA1

AJA2

Troubleshooting

Unable to ignite the plasma (either DC, RF or ion plasma)?

• Start by checking for shorts between pins on the power supply input, on the sputtering arm/ion source.

No rate?

• E-beam shutter open?
• Correct material selected on deposition controller?
• Enough current?
• Beam in center of crucible and hitting the material?
• Enough material in the crucible?

Rate falling during deposition?

Material running out. Needs top-up.

Crucible drive getting stuck?

• Drive support shafts worn + linear bearings gunked up. Replace
  • Protect by wiping with IPA
  • and covering with Al foil
• Crucible liner sideways. Abort and open system.

Can't turn on HV on the remote emission controller?

• Clear yellow error
• Make sure power supply is on
• Reconnect the controller cable

  Login as service: "2013"

  Adjust max emission so that 1% = 2.0/2.5 mA

Can't adjust current?

• Left in auto mode. Change back to manual
• Emission knob encoder broken. Send back to factory to repair/replace.

Red LED on loadlock gauge?

Power cycle should fix it during next vent/pump.

Lots of reflected power for an RF power source?

• The matching network for RF3 on AJA2 sometimes needs a bigger kick.
  • Try turning on the power without ramping it.
  • Another option would be to set the matching network to manual mode and strike the plasma, then turn it back to manual mode.
• The RF1 cable in the red shroud on AJA2 sometimes gets loose:

  Abort process, turn off RF milling power supply, reconnect cable, tighten as much as possible.

• The RF1 power supply controls are very sensitive, maybe someone touched them?

  Extremely slowly adjust Load to reach minimum of reflected power. If not 0 W, adust Tune. Iterate until 0 W.

Recipes failing when adjusting gas flow?

Adjust MFC timeout to 30 s

user: service

Software empty?

Fill in with parameters the Phase II J software configurations.

user: apex

Old notes

Older ion milling notes

When operating normally, the chamber should light a clear whiteish hue, and the kaufman power source should read numbers similar to these:

Approximate standard values on power supply when running the milling

Service/repair/purchasing

More notes and service/repair/purchasing contacts on the internal QDev wiki.